01.02.2020 - 08:00:00

New MOVPE reactor for InP-based THz devices

Within the framework of the "ForLab SmartBeam" funding program of the BMBF, the new metal organic vapor phase epitaxy system CCS6x2FT was purchased from Aixtron for the epitaxial growth of highly crystalline layer systems of phosphide and arsenide compound semiconductors. Such highly crystalline layer packages significantly determine the properties and performance of later semiconductor components. The growth of these crystalline layers is therefore a decisive and critical step in the (further) development of existing and novel devices, such as InP-based heterojunction bipolar transistors for THz-enabled emitters and amplifiers. In its current configuration, the system can be equipped with up to eleven different material sources, thus enabling even the most complex layer systems and offering a high degree of variability in use for existing and future research projects.

The reactor of the plant will be mainly used for the production of HBTs and is state of the art. It is based on the "closed-coupled-showerhead" principle, which means that the process gases for crystal growth hit the growth substrates directly from above from a very small distance. Furthermore, the temperature in the reactor can be precisely controlled by a three-zone heater and a full-surface in situ temperature control. This results in a very uniform growth over the entire reactor surface, while at the same time making efficient use of the expensive starting materials and a controllable growth rate. In addition to temperature control, the reactor is equipped with further state-of-the-art measuring technology, thus enabling monitoring of roughness and layer thickness. The reactor can be equipped with six 2" wafers, three 3" wafers, one 4" or one 6" wafer at the same time. This allows the use of industry-relevant wafer sizes and the transfer of developed processes to industrial processes.
The reactor is already located in the clean room of the ZHO and is currently being integrated into the clean room infrastructure. The commissioning of the reactor is planned for autumn this year.