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Prof. Dr.-Ing. Holger Vogt

Anschrift
Bismarckstr. 81 (BB)
47057 Duisburg
Raum
BB 813
Telefon
+49 203 379 3247
Telefax
+49 203 379 28 88
E-Mail
holger.vogt@ims.fraunhofer.de

Funktionen

  • Universitätsprofessor/in em./i.R., Elektronische Bauelemente und Schaltungen

Die folgenden Publikationen sind in der Online-Universitätsbibliographie der Universität Duisburg-Essen verzeichnet. Weitere Informationen finden Sie gegebenenfalls auch auf den persönlichen Webseiten der Person.

    Artikel in Zeitschriften

  • Verheyen, Erik; Vogt, Holger
    Modeling and Characterization of Adapted 3ω-Method for Thermal Conduction Measurement of Thermal Radiation Sensors
    In: IEEE Sensors Letters Jg. 4 (2020) Nr. 7, 9119082
    Online Volltext: dx.doi.org/
  • Allani, Sonja; Jupe, Andreas; Staufer, Oskar; Seidl, Karsten; Vogt, Holger
    Monolithic Integration and Analysis of Vertical, Partially Encapsulated Nanoelectrode Arrays
    In: Journal of Microelectromechanical Systems Jg. 29 (2020) Nr. 5, S. 1180 - 1188
    Online Volltext: dx.doi.org/
  • Michel, Marvin; Vogt, Holger
    Modeling of thermal conductivity for a CMOS-compatible MEMS-ROIC contact by TiN nanotubes
    In: IEEE Transactions on Electron Devices (T-ED) Jg. 66 (2019) Nr. 8, S. 3485 - 3491
    Online Volltext: dx.doi.org/ (Open Access)
  • Türk, Semih; Schug, Alexander; Viga, Reinhard; Jupe, Andreas; Vogt, Holger
    Optimization of the dielectric layer for electrowetting on dielectric
    In: Integration: The VLSI Journal Jg. 67 (2019) S. 50 - 59
    Online Volltext: dx.doi.org/ Online Volltext (Open Access)
  • Wang, Qiang; Vogt, Holger
    With PECVD deposited poly-SiGe and poly-Ge forming contacts between MEMS and electronics
    In: Journal of Electronic Materials (JEM) Jg. 48 (2019) Nr. 11, S. 7360 - 7365
    Online Volltext: dx.doi.org/
  • Dogan, Özgü; Buschhausen, A.; Walk, Christian; Mokwa, Wilfried; Vogt, Holger;
    Development of a Post-CMOS Compatible Nanoporous Thin Film layer Based on Al₂O₃
    International Conference on Nanomaterials and Biomaterials (ICNB) ; 11–13 December 2017, Amsterdam, The Netherlands,
    In: IOP Conference Series: Materials Science and Engineering Jg. 350 (2018) Nr. 1, 012001
    Online Volltext: dx.doi.org/ (Open Access)
  • Verheyen, Erik; Erbslöh, Andreas; Viga, Reinhard; Vogt, Holger
    Simulation Results of Prospective Next Generation 3-D Thermopile Sensor and Array Circuitry Options
    In: IEEE Sensors Letters Jg. 2 (2018) Nr. 2, 2500604
    Online Volltext: dx.doi.org/
  • Schmidt, Andrei; Dreiner, Stefan; Vogt, Holger; Goehlich, Andreas; Paschen, Uwe
    Analytical model for thin-film SOI PIN-diode leakage current
    In: Solid State Electronics Jg. 130 (2017) S. 4 - 8
    Online Volltext: dx.doi.org/
  • Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger
    Fabrication and electrochemical characterization of ruthenium nanoelectrodes
    In: Current Directions in Biomedical Engineering Jg. 3 (2017) Nr. 2, S. 393 - 396
    Online Volltext: dx.doi.org/ (Open Access)
  • Mross, Stefan; Zimmermann, Tom; Zenzes, Sebastian; Kraft, Michael; Vogt, Holger
    Study of enzyme sensors with wide, adjustable measurement ranges for in-situ monitoring of biotechnological processes
    In: Sensors and Actuators B: Chemical Jg. 241 (2017) S. 48 - 54
    Online Volltext: dx.doi.org/
  • Muckensturm, Kai-Marcel; Weiler, Dirk; Hochschul, Frank; Busch, Claudia; Geruschke, Thomas; Wall, Simone; Heß, Jennifer; Lerch, Renee; Würfel, Daniel; Vogt, Holger;
    Ungekühlte Mikrobolometer-Arrays mit einer Pixelgröße von 12 µm basierend auf einer neuartigen thermisch isolierenden Struktur
    18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016 ; 10. - 11. Mai 2016, Nürnberg,
    In: Technisches Messen: tm Jg. 84 (2017) Nr. 6, S. 381 - 388
    Online Volltext: dx.doi.org/
  • Kelberer, Andreas; Dreiner, Stefan; Grella, Katharina; Dittrich, Dirk; Kappert, Holger; Vogt, Holger; Paschen, Uwe
    Experimental reliability studies and SPICE simulation for EEPROM at temperatures up to 450°C
    In: Journal of Microelectronics and Electronic Packaging Jg. 13 (2016) Nr. 1, S. 33 - 37
    Online Volltext: dx.doi.org/
  • Vogt, Holger; Altmann, Frank; Braun, Sebastian; Celik, Yusuf; Dietrich, Lothar; Dietz, Dorothee; van Dijk, Marius; Dreiner, Stefan; Döring, Ralf; Gabler, Felix; Goehlich, Andreas; Hutter, Matthias; Ihle, Martin; Kappert, Holger; Kordas, Norbert; Kokozinski, Rainer; Naumann, Falk; Nowak, Torsten; Oppermann, Hermann; Partsch, Uwe; Petzold, Matthias; Roscher, Frank; Rzepka, Sven; Schubert, Ralph; Weber, Constanze; Wiemer, Maik; Wittler, Olaf; Ziesche, Steffen;
    HOT-300 – a multidisciplinary technology approach targeting microelectronic systems at 300 C operating temperature
    International Conference and Exhibition on High Temperature Electronics 2016 (HiTEC 2016) ; 10-12 May 2016, Albuquerque, New Mexico, USA,
    In: Additional Conferences (Device Packaging, HiTEC, HiTEN, & CICMT) (2016) S. 1 - 10
    Online Volltext: dx.doi.org/
  • Mross, Stefan; Zimmermann, Tom; Winkin, Nadine; Kraft, Michael; Vogt, Holger
    Integrated multi-sensor system for parallel in-situ monitoring of cell nutrients, metabolites, cell density and pH in biotechnological processes
    In: Sensors and Actuators B: Chemical Jg. 236 (2016) S. 937 - 946
    Online Volltext: dx.doi.org/
  • Driewer, Adrian; Hosticka, Bedrich; Spickermann, Andreas; Vogt, Holger
    Modeling of the charge transfer in a lateral drift field photo detector
    In: Solid State Electronics Jg. 126 (2016) S. 51 - 58
    Online Volltext: dx.doi.org/
  • Mross, Stefan; Fürst, Peter; Pierrat, Sebastien; Zimmermann, Tom; Vogt, Holger; Kraft, Michael
    Enzyme sensor with polydimethylsiloxane membrane and CMOS potentiostat for wide-range glucose measurements
    In: IEEE Sensors Journal (J-SEN) Jg. 15 (2015) Nr. 12, S. 7096 - 7104
    Online Volltext: dx.doi.org/
  • Kelberer, Andreas; Dreiner, Stefan; Grella, Katharina; Dittrich, Dirk; Kappert, Holger; Vogt, Holger; Paschen, Uwe;
    Experimental reliability studies and SPICE simulation for EEPROM at temperatures up to 450°C
    International Conference on High Temperature Electronics Network 2015 (HiTEN 2015) ; 6 - 8 July 2015, Cambridge, UK,
    In: Additional Conferences (Device Packaging, HiTEC, HiTEN, & CICMT) (2015) S. 5 - 9
    Online Volltext: dx.doi.org/
  • Elßner, Michael; Vogt, Holger
    Failure mechanisms of microbolometer thermal imager sensors using chip-scale packaging
    In: Microelectronics Reliability Jg. 55 (2015) Nr. 9-10, S. 1901 - 1905
    Online Volltext: dx.doi.org/
  • Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger; Kappert, Holger;
    High-temperature trench capacitors, using thin-film ALD dielectrics
    International Conference on High Temperature Electronics Network 2015 (HiTEN 2015) ; 6 - 8 July 2015, Cambridge, UK,
    In: Additional Conferences (Device Packaging, HiTEC, HiTEN, & CICMT) (2015) S. 130 - 133
    Online Volltext: dx.doi.org/
  • Mross, Stefan; Zimmermann, Tom; Winkin, Nadine; Kraft, Michael; Vogt, Holger
    Integrated multi-sensor system for parallel in-situ monitoring of cell nutrients, metabolites and cell mass in biotechnological processes
    In: Procedia Engineering Jg. 120 (2015) S. 372 - 375
    Online Volltext: dx.doi.org/ (Open Access)
  • Elßner, Michael; Vogt, Holger
    Reliability of microbolometer thermal imager sensors using chip-scale packaging
    In: Procedia Engineering Jg. 120 (2015) S. 1191 - 1196
    Online Volltext: dx.doi.org/ (Open Access)
  • Gembaczka, Pierre; Görtz, Michael; Celik, Yusuf; Jupe, Andreas; Stühlmeyer, Martin; Goehlich, Andreas; Vogt, Holger; Mokwa, Wilfried; Kraft, Michael
    Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition
    In: Journal of Sensors and Sensor Systems (JSSS) Jg. 3 (2014) Nr. 2, S. 335 - 347
    Online Volltext: dx.doi.org/ (Open Access)
  • Wang, Qiang; Goehlich, Andreas; Ruß, Marco; Yang, Pin; Vogt, Holger
    PECVD of poly-SiGe/Ge layers with increased total gas flow
    In: Microelectronic Engineering Jg. 115 (2014) S. 26 - 31
    Online Volltext: dx.doi.org/
  • Grella, Katharina; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
    Reliability of CMOS on silicon-on-insulator for use at 250°C
    In: IEEE Transactions on Device and Materials Reliability (T-DMR) Jg. 14 (2014) Nr. 1, S. 21 - 29
    Online Volltext: dx.doi.org/
  • Dreiner, Stefan; Grella, Katharina; Heiermann, Wolfgang; Kelberer, Andreas; Kappert, Holger; Vogt, Holger; Paschen, Uwe
    Zuverlässigkeitsuntersuchungen an einer hochtemperaturtauglichen SOI-CMOS-Technologie
    In: PLUS: Produktion von Leiterplatten und Systemen Jg. 16 (2014) Nr. 6, S. 1299 - 1308
  • Kropelnicki, Piotr; Muckensturm, Kai-Marcel; Mu, Xiaojing; Randles, Andrew B.; Cai, Hong; Ang, W. C.; Tsai, Julius M.; Vogt, Holger
    CMOS-compatible ruggedized high temperature Lamb wave pressure sensor
    In: Journal of Micromechanics and Microengineering Jg. 23 (2013) Nr. 8, 085018
    Online Volltext: dx.doi.org/
  • Vogt, Holger; Heiermann, Wolfgang; Heß, Jennifer
    Galvanik in der Mikrosystemtechnik
    In: ATZ-Elektronik Jg. 8 (2013) Nr. 2, S. 88 - 93
    Online Volltext: dx.doi.org/
  • Grella, Katharina; Dreiner, Stefan; Schmidt, Alexander; Heiermann, Wolfgang; Kappert, Holger; Vogt, Holger; Paschen, Uwe
    High temperature characterization up to 450°C of MOSFETs and basic circuits realized in a Silicon-on-Insulator (SOI) CMOS-technology
    In: Journal of Microelectronics and Electronic Packaging Jg. 10 (2013) Nr. 2, S. 67 - 72
    Online Volltext: dx.doi.org/
  • Grella, Katharina; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe;
    High temperature reliability investigations up to 350 °C of gate oxide capacitors realized in a Silicon-on-Insulator CMOS-technology
    International Conference and Exhibition on High Temperature Electronics Network 2013 (HiTEN 2013) ; 8 - 10 July 2013, Oxford, UK,
    In: Additional Conferences (Device Packaging, HiTEC, HiTEN, & CICMT) (2013) S. 116 - 121
    Online Volltext: dx.doi.org/
  • Grella, Katharina; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
    Reliability investigations up to 350°C of gate oxid capacitors realized in a Silicon-on-Insulator CMOS technology
    In: Journal of Microelectronics and Electronic Packaging Jg. 10 (2013) Nr. 4, S. 150 - 154
    Online Volltext: dx.doi.org/
  • Cleven, Nina J.; Müntjes, Jutta A.; Fassbender, Holger; Urban, Ute; Görtz, Michael; Vogt, Holger; Gräfe, Maik; Göttsche, Thorsten; Penzkofer, Tobias; Schmitz-Rode, Thomas; Mokwa, Wilfried
    A novel fully implantable wireless sensor system for monitoring hypertension patients
    In: IEEE Transactions on Biomedical Engineering (T-BME) Jg. 59 (2012) Nr. 11, S. 3124 - 3130
    Online Volltext: dx.doi.org/
  • Würfel, Daniel; Vogt, Holger
    An improved electrical and thermal model of a microbolometer for electronic circuit simulation
    In: Advances in Radio Science Jg. 10 (2012) S. 183 - 186
    Online Volltext: dx.doi.org/ (Open Access)
  • Grella, Katharina; Dreiner, Stefan; Schmidt, Alexander; Heiermann, Wolfgang; Kappert, Holger; Vogt, Holger; Paschen, Uwe;
    High temperature characterization up to 450 °C of MOSFETs and basic circuits realized in a Silicon-on-Insulator (SOI) CMOS-technology
    International Conference and Tabletop Exhibition on High Temperature Electronics 2012 (HiTEC 2012) ; May 8-10, 2012; Albuquerque, New Mexico, USA,
    In: Additional Conferences (Device Packaging, HiTEC, HiTEN, & CICMT) (2012) S. 227 - 232
    Online Volltext: dx.doi.org/
  • Herbert, Stefan; Banyay, Matus; Maryasov, Alexey; Hochschulz, Frank; Paschen, Uwe; Vogt, Holger; Juschkin, Larissa
    Quantum efficiency determination of a novel CMOS design for fast imaging applications in the extreme ultraviolet
    In: IEEE Transactions on Electron Devices (T-ED) Jg. 59 (2012) Nr. 3, S. 846 - 849
    Online Volltext: dx.doi.org/
  • Utz, Alexander; Gendrisch, Lutz; Weiler, Dirk; Kolnsberg, Stephan; Vogt, Holger;
    Simulation method for LWIR radiation distribution using a visual ray-tracer
    International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) ; 5 - 8 Sept. 2011, Rome, Italy,
    In: Optical and Quantum Electronics Jg. 44 (2012) Nr. 3-5: Special Issue: Numerical Simulation of Optoelectronic Devices NUSOD'11, S. 297 - 301
    Online Volltext: dx.doi.org/
  • Würfel, Daniel; Ruß, Marco; Lerch, Renee G.; Weiler, Dirk; Yang, Pin; Vogt, Holger
    An uncooled VGA-IRFPA with novel readout architecture
    In: Advances in Radio Science Jg. 9 (2011) S. 107 - 110
    Online Volltext: dx.doi.org/ (Open Access)
  • Grella, Katharina; Vogt, Holger; Paschen, Uwe;
    High temperature reliability investigations of EEPROM memory cells realised in Silicon-on-Insulator (SOI) technology
    International Conference on High Temperature Electronics Network 2011 (HiTEN 2011) ; 18 - 20 July 2011, Oxford, UK,
    In: Additional Conferences (Device Packaging, HiTEC, HiTEN, & CICMT) (2011) S. 221 - 225
    Online Volltext: dx.doi.org/
  • Sommer, Sebastian P.; Paschen, Uwe; Figge, Martin; Vogt, Holger
    Light switched plasma charging protection device for high-field characterization and flash memory protection
    In: IEEE Transactions on Device and Materials Reliability (T-DMR) Jg. 11 (2011) Nr. 1, S. 81 - 85
    Online Volltext: dx.doi.org/
  • Hochschulz, Frank; Brockherde, Werner; Vogt, Holger; Paschen, Uwe
    Neue CMOS-Bildsensoren erweitern Einsatzmöglichkeiten
    In: Labor-Praxis Jg. 35 (2011) Nr. 5, S. 22 - 24
    Online Volltext
  • Utz, Alexander; Gendrisch, Lutz; Vogt, Holger
    Simulating far-infrared scenarios with the radiance synthetic imaging system
    In: Computing in Science and Engineering (CiSE) Jg. 13 (2011) Nr. 4, S. 98 - 103
    Online Volltext: dx.doi.org/
  • Durini, Daniel; Spickermann, Andreas; Mahdi, Rana; Brockherde, Werner; Vogt, Holger; Grabmaier, Anton; Hosticka, Bedrich;
    Lateral drift-field photodiode for low noise, high-speed, large photoactive-area CMOS imaging applications
    New Developments in Radiation Detectors ; 11th European Symposium on Semiconductor Detectors (ESSD) ; 7-11 June 2009, Wildbad Kreuth, Germany,
    In: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment Jg. 624 (2010) Nr. 2, S. 470 - 475
    Online Volltext: dx.doi.org/
  • Würfel, Daniel; Weiler, Dirk; Hosticka, Bedrich; Vogt, Holger
    Noise of short-time integrators for readout of uncooled infrared bolometer arrays
    In: Advances in Radio Science Jg. 8 (2010) S. 129 - 133
    Online Volltext: dx.doi.org/ (Open Access)
  • Nachrodt, Dirk; Paschen, Uwe; ten Have, Arnd; Vogt, Holger
    Ti/Ni(80%)Cr(20%) thin-film resistor with a nearly zero temperature coefficient of resistance for integration in a standard CMOS process
    In: IEEE Electron Device Letters (L-ED) Jg. 29 (2008) Nr. 3, S. 212 - 214
    Online Volltext: dx.doi.org/
  • Köster, Oliver; Schuhmann, Wolfgang; Vogt, Holger; Mokwa, Wilfried;
    Quality control of ultra-microelectrode arrays using cyclic voltammetry, electrochemical impedance spectroscopy and scanning electrochemical microscopy
    Eighth International Meeting on Chemical Sensors (IMCS) ; 2 - 5 July 2000, Basel, Switzerland,
    In: Sensors and Actuators B: Chemical Jg. 76 (2001) Nr. 1-3, S. 573 - 581
    Online Volltext: dx.doi.org/
  • Steck, Beate; Vogt, Holger
    Optimization of vertical 600 and 1500 V SOI-ESTs with low on-state voltages
    In: Solid State Electronics Jg. 44 (2000) Nr. 12, S. 2131 - 2138
    Online Volltext: dx.doi.org/
  • Weyers, J.; Rost, W.; Vogt, Holger
    Entwicklung eines BICMOS-Smart-Power-Prozesses in lokaler SIMOX-Technologie
    In: Electrical Engineering Jg. 79 (1996) Nr. 5, S. 335 - 341
    Online Volltext: dx.doi.org/
  • Werno, Jochen; Kersjes, Ralf A.; Mokwa, Wilfried; Vogt, Holger;
    Reduction of heat loss of silicon membranes by the use of trench etching techniques
    Eurosensors VII ; September 26 - 29, 1993, Budapest, Hungary,
    In: Sensors and actuators A: Physical Jg. 42 (1994) Nr. 1-3, S. 578 - 581
    Online Volltext: dx.doi.org/
  • Vogt, Holger
    Intelligente Sensoren auf dem Weg zum ASIC
    In: Markt und Technik (1993) Nr. 30, S. 24 - 26
  • Gassel, Helmut; Peter-Weidemann, Jürgen; Vogt, Holger
    Novel approach to defect etching in thin film silicon-on-insulator
    In: Journal of the Electrochemical Society (JES) Jg. 140 (1993) Nr. 6, S. 1713 - 1716
    Online Volltext: dx.doi.org/
  • Vogt, Holger
    Smart power technology with dielectric insulation : Processes and applications
    In: Electron Technology: Internet Journal Jg. 26 (1993) Nr. 1, S. 83 - 93
  • Kandler, Michael; Manoli, Yiannakis; Mokwa, Wilfried; Spiegel, Egbert; Vogt, Holger
    A miniature single-chip pressure and temperature sensor
    In: Journal of Micromechanics and Microengineering Jg. 2 (1992) Nr. 3, S. 199 - 201
    Online Volltext: dx.doi.org/
  • Mokwa, Wilfried; Vogt, Holger
    Dreidimensionale Mikrostrukturen eröffnen neue Anwendungen : Geringes Gewicht, kleinste Abmessungen durch Integration auf kleinstem Raum
    In: Handelsblatt Jg. 47 (1992) Nr. 214, S. 30
  • Weyers, J.; Vogt, Holger; Berger, Michael; Mach, Wolfgang; Mütterlein, Bernward; Raab, Michael; Richter, F.; Vogt, Franz P.
    Integration of vertical/quasivertical DMOS, CMOS and bipolar transistors in a 50V SIMOX process
    In: Microelectronic Engineering Jg. 19 (1992) Nr. 1-4, S. 733 - 735
    Online Volltext: dx.doi.org/
  • Badenes, Goncal; Burbach, Gert; Gassel, Helmut; Vogt, Holger; Walter, Axel
    Minimum oxygen dose for reliable application of SIMOX
    In: Materials Science and Engineering B: Solid-State Materials for Advanced Technology Jg. 12 (1992) Nr. 1-2, S. 149 - 151
    Online Volltext: dx.doi.org/
  • Dura, Heinz-Georg; Schöneberg, Uwe; Mokwa, Wilfried; Hosticka, Bedrich; Vogt, Holger
    Performance of hydrogen-sensitive MOS capacitances with integrated on-chip signal conditioning
    In: Sensors and Actuators B: Chemical Jg. 6 (1992) Nr. 1-3, S. 162 - 164
    Online Volltext: dx.doi.org/
  • Belz, Joachim; Burbach, Gert; Vogt, Holger; Zimmer, Günter;
    High-quality SOI-substrates for CMOS transistors
    1st SIMOX Workshop ; 7 and 8 November 1988, Guildford, Surrey, UK,
    In: Vacuum Jg. 42 (1991) Nr. 5-6, S. 387 - 388
    Online Volltext: dx.doi.org/
  • Buttler, Werner; Vogt, Holger; Lutz, Gerhard; Manfredi, Pier Francesco; Speziali, Valeria
    JFET-PMOS technology, in the design of monolithic preamplifier systems for multielectrode detectors
    In: IEEE Transactions on Nuclear Science (T-NS) Jg. 38 (1991) Nr. 2, S. 69 - 76
    Online Volltext: dx.doi.org/
  • Badenes, Goncal; Abel, Hans B.; Gassel, Helmut; Burbach, Gert; Vogt, Holger
    Measurement of SOI film thickness
    In: Microelectronic Engineering Jg. 15 (1991) Nr. 1-4, S. 207 - 210
    Online Volltext: dx.doi.org/
  • Vogt, Holger; Burbach, Gert; Belz, Joachim; Zimmer, Günter
    Silicon-on-insulator development in Europe
    In: Solid State Technology Jg. 34 (1991) Nr. 2, S. 79 - 83
  • Boguszewicz, Remigiusz; Burbach, Gert; Fiedler, Horst-Lothar; Mütterlein, Bernward; Vogt, Franz P.; Vogt, Holger
    Leistungsschalter für 500 V mit dielektrisch isolierter CMOS-Signalelektronik
    In: Mikro-Elektronik: me Jg. 4 (1990) Nr. 6, S. 256 - 259
  • Zimmer, Günter; Vogt, Holger; Lackmann, Rainer
    Trends in VLSI technologies
    In: Microelectronic Engineering Jg. 12 (1990) Nr. 1-4, S. 1 - 11
    Online Volltext: dx.doi.org/
  • Belz, Joachim; Burbach, Gert; Vogt, Holger; Peter-Weidemann, Jürgen; Zimmer, Günter
    High quality silicon-on-insulator substrates by implanted oxygen ions
    In: Materials Science and Engineering B: Solid-State Materials for Advanced Technology Jg. 4 (1989) Nr. 1-4, S. 429 - 433
    Online Volltext: dx.doi.org/
  • Vogt, Holger; Burbach, Gert; Belz, Joachim; Zimmer, Günter
    MESFETs in thin silicon on SIMOX
    In: Electronics Letters Jg. 25 (1989) Nr. 23, S. 1580 - 1581
    Online Volltext: dx.doi.org/
  • Lutz, Gerhard; Maloberti, Franco; Manfredi, Pier Francesco; Re, Valerio; Speziali, Valeria; Buttler, Werner; Vogt, Holger
    On the design of a JFET-CMOS front-end for low-noise data acquisition from microstrip detectors
    In: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment Jg. 264 (1988) Nr. 2-3, S. 391 - 398
    Online Volltext: dx.doi.org/
  • Vogt, Holger
    A technology concept for integrated detector electronics with CMOS-compatible devices
    In: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment Jg. 253 (1987) Nr. 3, S. 434 - 438
    Online Volltext: dx.doi.org/
  • Belz, Joachim; Kaat, Erich H. te; Zimmer, Günter; Vogt, Holger;
    Characterization of buried silicon-nitride formed by nitrogen implantation
    Ion Beam Modification of Materials ; Fifth International Conference on Ion Beam Modification of Materials ; 9 - 13 June 1986, Catania, Italy,
    In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Jg. 19-20 (1987) Nr. Part 1, S. 279 - 284
    Online Volltext: dx.doi.org/
  • Zimmer, Günter; Vogt, Holger
    Anwendung des Lasers zur Herstellung neuer Strukturen für die Mikroelektronik
    In: Laser und Optoelektronik Jg. 18 (1986) Nr. 1, S. 49 - 54
  • Zimmer, Günter; Vogt, Holger
    CMOS on buried nitride : A VLSI SOI technology
    In: IEEE Transactions on Electron Devices (T-ED) Jg. 30 (1983) Nr. 11, S. 1515 - 1520
    Online Volltext: dx.doi.org/
  • Zimmer, Günter; Vogt, Holger; Neubert, E.; Staks, P.
    Performance of buried nitride CMOS devices
    In: IEEE Transactions on Electron Devices (T-ED) Jg. 30 (1983) Nr. 11, S. 1606 - 1607
    Online Volltext: dx.doi.org/
  • Hosticka, Bedrich; Kleine, Ulrich; Vogt, Holger; Zimmer, Günter
    DICMOS - novel MOS logic
    In: Electronics Letters Jg. 18 (1982) Nr. 21, S. 930 - 932
    Online Volltext: dx.doi.org/
  • Zimmer, Günter; Fiedler, Horst; Höfflinger, Bernd; Neubert, E.; Vogt, Holger
    Performance of a scaled Si gate n-well CMOS technology
    In: Electronics Letters Jg. 17 (1981) Nr. 18, S. 666 - 667
    Online Volltext: dx.doi.org/

    • Abstracts

  • Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
    3D applicable ALD film for humidity detection
    In: SmartSystems Integration: 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems ; Barcelona, Spain, 10 – 11 April 2019 / Smartsystems Integration (SSI) ; International Conference and Exhibition on Integration Issues of Miniaturized Systems ; 10 - 11 April 2019, Barcelona, Spain / Otto, Thomas (Hrsg.) (2019) S. 309 - 312
  • Türk, Semih; Viga, Reinhard; Vogt, Holger
    Diamond like carbon as a hydrophobic material for electrowetting
    In: 3rd YRA MedTech Symposium 2019: Symposium Proceedings / 3rd YRA MedTech Symposium, May 24 2019, FH Aachen, Campus Jülich, Germany / Staat, Manfred; Erni, Daniel (Hrsg.) (2019) S. 47 - 48
    (Open Access)
  • Knauß, A. M.; Dietz, Dorothee; Jupe, Andreas; Kappert, Holger; Vogt, Holger; Mai, L.; Devi, Anjana
    Herstellung nano-skalierter Gassensoren unter Verwendung neuer Metalloxid-ALD-Precursormaterialien
    In: MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz / MikroSystemTechnik Kongress ; 28. – 30. Oktober 2019, Berlin (2019) S. 514 - 517
  • Türk, Semih; Jupe, Andreas; Viga, Reinhard; Vogt, Holger
    Mikrostrukturierung für super-hydrophobe Oberflächen in Electrowetting
    In: MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz / MikroSystemTechnik Kongress ; 28. – 30. Oktober 2019, Berlin (2019) S. 762 - 765
  • Livshits, Pavel; Jupe, Andreas; Kahnert, Stefan; Figge, Martin; Mross, Stefan; Görtz, Michael; Vogt, Holger; Goehlich, Andreas;
    Development of micro electromechanical biosensor for fast detection of respiratory syncytial virus infections in newborns
    BMTMedPhys 2017 ; Annual Meeting of the German Society of Biomedical Engineering and Joint Conference in Medical Physics ; 10–13 September 2017, Dresden, Germany,
    In: Biomedical engineering = Biomedizinische Technik Jg. 62 (2017) Nr. s1, S. S144
    Online Volltext: dx.doi.org/ (Open Access)
  • Burmester, Kim; Goehlich, Andreas; Celik, Yusuf; Manova, Radostina K.; Scheres, Luc; Roeven, Esther; Trilling, Anke; Schmidt, Andreas; Hutten, Ulrike; Neureiter, Katrin; Pierrat, Sebastien; van Beek, Teris A.; Vogt, Holger;
    CMOS integrated biosensor for the detection of biomarkers
    BMT 2014 ; 48. DGBMT Jahrestagung ; October 8-10, 2014, Hannover, Germany,
    In: Biomedical engineering = Biomedizinische Technik Jg. 59 (2014) Nr. s1, S. S120
    Online Volltext: dx.doi.org/
  • Kahnert, Stefan; Goehlich, Andreas; Greifendorf, Dieter; Vogt, Holger; Lennartz, Klaus; Kirstein, Uwe; Göllner, Bastian; Michelsen, Ulrike; Bartels, Frank; Schreiber, Fedor; Rennings, Andreas; Erni, Daniel;
    Development of a microchip based cell sorting device
    BMT 2014 ; 48. DGBMT Jahrestagung ; October 8-10, 2014, Hannover, Germany,
    In: Biomedical engineering = Biomedizinische Technik Jg. 59 (2014) Nr. s1, S. S121 - S123
    Online Volltext: dx.doi.org/ (Open Access)
  • Betz, Wolfgang; Trieu, Hoc-Khiem; Vogt, Holger;
    Microelectromechanical implants: encapsulation concepts and test procedures
    BMT 2012 ; 46. DGBMT Jahrestagung ; Track D, Biomaterials and Biocompatibility ; 16. bis 19. September 2012, Jena,
    In: Biomedical engineering = Biomedizinische Technik Jg. 57 (2012) Nr. s1, S. 914
    Online Volltext: dx.doi.org/
  • Dierk, Sarah; Ünlübayir, Sinan; Trieu, Hoc-Khiem; Vogt, Holger; Köper, Ingo;
    A new approach for detecting ionophore concentrations in tethered bilayer lipid membranes
    BMT 2011 ; 45. Jahrestagung der DGBMT ; 27. - 30. September 2011, Freiburg, Germany,
    In: Biomedical engineering = Biomedizinische Technik Jg. 56 (2011) Nr. s1, P96
    Online Volltext: dx.doi.org/
  • Durini, Daniel; Dreiner, Stefan; Vogt, Holger
    Indium-Tin-Oxide (ITO) layer integration in single-polysilicon standard CMOS processes to improve the CTE in photogate pixels
    In: Proceedings of the EOS Conferences at the World of Photonics Congress 2009: ICM, International Congress Centre Munich, Germany ; digest CD-ROM contents: frontiers in electronic imaging, 15 to 16 June 2009 [and] manufacturing of optical components, 15 to 17 June 2009 / EOS Conference on Frontiers in Electronic Imaging ; EOS Conference on Manufacturing of Optical Components ; World of Photonics Congress ; 15 to 17 June, 2009, Munich, Germany (2009)
  • Kropelnicki, Piotr; Vogt, Holger
    Monocrystalline diode bolometer made by low temperature direct wafer bonding
    In: WaferBond '09: Book of abstracts / Conference on Wafer Bonding for Microsystems, 3D- and Wafer Level Integration (WaferBond) ; 06.-08.12.2009, Grenoble, France (2009) S. 83 - 84
  • Vogt, Holger; Vogt, Hendrik
    Simulation des Laserabgleichs von Dünnfilmwiderständen mit Widerstandsnetzwerk im Schaltungssimulator
    In: MikroSystemTechnik-Kongress 2009: 12. - 14. Oktober 2009, Berlin ; Proceedings / MikroSystemTechnik-Kongress ; 12. - 14. Oktober 2009, Berlin (2009) S. .
  • Sommer, Sebastian P.; Paschen, Uwe; Vogt, Holger
    Positive charge trapping induced by plasma charging damage in NMOS transistors
    In: 38th European Solid-State Device Research Conference (ESSDERC) and 34th European Solid State Circuits Conference (ESSCIRC): [incl. Fringe Poster Session] / European Solid-State Device Research Conference (ESSDERC) ; 34th European Solid State Circuits Conference (ESSCIRC) ; 15 - 19 September 2008, Edinburgh, Scotland, UK (2008) P28
  • Hariadi, Ihsan; Trieu, Hoc-Khiem; Mokwa, Wilfried; Vogt, Holger
    Integrated flow sensor with monocrystalline silicon membrane operating in Thermal Time-of-Flight mode
    In: Eurosensors XVI: The 16th European Conference on Solid-State Transducers, September 15 - 18, 2002, Prague, Czech Republic ; Book of Abstracts ; Pt. 2:Tuesday / European Conference on Solid-State Transducers ; Eurosensors ; September 15 - 18, 2002, Prague, Czech Republic / Saneistr, Jiri; Ripka, Pavel (Hrsg.) (2002) S. 403 - 404
  • Hariadi, Ihsan; Trieu, Hoc-Khiem; Mokwa, Wilfried; Vogt, Holger
    Investigations on silicon thermal flow sensors with mesa structures
    In: Eurosensors XVI: The 16th European Conference on Solid-State Transducers, September 15 - 18, 2002, Prague, Czech Republic ; Book of Abstracts ; Pt. 2:Tuesday / European Conference on Solid-State Transducers ; Eurosensors ; September 15 - 18, 2002, Prague, Czech Republic / Saneistr, Jiri; Ripka, Pavel (Hrsg.) (2002) S. 405 - 406
  • Köster, Oliver; Schuhmann, Wolfgang; Vogt, Holger; Mokwa, Wilfried
    Investigation of the properties of a single-chip potentiostat supporting three electrode cells for its operation with voltammetric and AC modes
    In: 3rd International Symposium on Electrochemical Microsystem Technologies: Program and abstracts / International Symposium on Electrochemical Microsystem Technologies ; 10.-15.09.2000, Garmisch-Partenkirchen, Germany (2000) S. 41
  • Köster, Oliver; Schuhmann, Wolfgang; Vogt, Holger; Mokwa, Wilfried
    On the determination of standard rate constants using ultra-microelectrode arrays and electrochemical impedance spectroscopy at low frequencies
    In: Electroanalysis: abstracts of the 8th international conference held from 11 to 15 June 2000 at the University of Bonn, Germany / International Conference on ElectroAnalysis (ESEAC) ; 11 to 15 June 2000, Bonn, Germany / Emons, Hendrik; Ostapczuk, Peter (Hrsg.) (2000) B 03
  • Köster, Oliver; Schuhmann, Wolfgang; Vogt, Holger; Mokwa, Wilfried
    Quality control of ultra-microelectrode arrays using cyclic voltammetry, electrochemical impedance spectroscopy and scanning electrochemical microscopy
    In: 8th International Meeting on Chemical Sensors (IMCS-8): Abstract book / International Meeting on Chemical Sensors (IMCS) ; 2 - 5 July 2000, Basel, Switzerland (2000) S. 174
  • Werno, Jochen; Mokwa, Wilfried; Vogt, Holger; Kersjes, Ralf A.
    Reduction of heat loss of silicon membranes by the use of trench etching techniques
    In: Abstracts: Eurosensors VII / Eurosensors ; 26 - 29 September 1993, Budapest (1993) S. 348
  • Gassel, Helmut; Vogt, Holger
    SIMOX and wafer bonding, combination of competitors complements one another
    In: Extended abstracts: 183rd Electrochemical Society Meeting ; Spring meeting ; Honolulu, Hawaii, USA, 16.-21.05. 1993 / Spring Meeting of the Electrochemical Society ; 16.-21.05. 1993, Honolulu, Hawaii, USA (1993) S. 1246 - 1247
  • Kandler, Michael; Manoli, Yiannakis; Mokwa, Wilfried; Spiegel, Egbert; Vogt, Holger
    A miniature single chip pressure and temperature sensor
    In: MME '92: Micromechanics Europe 1992 ; 3rd Workshop on Micromachining, Micromechanics and Microsystems ; June 1 - 2, 1992, Leuven, Belgium ; Workshop digest / Workshop on Micromachining, Micromechanics and Microsystems (MME) ; Micromechanics Europe ; June 1 - 2, 1992, Leuven, Belgium (1992) S. 183 - 186
  • Vogt, Franz P.; Mütterlein, Bernward; Vogt, Holger
    An intelligent 500 V power vertical DMOS on SIMOX substrate
    In: Extended abstracts: 181st Society Meeting / Meeting of the Electrochemical Society ; May 17 - 22, 1992, St. Louis, Mo., USA (1992) S. 265 - 266
  • Dura, Heinz-Georg; Gassel, Helmut; Mokwa, Wilfried; Vogt, Holger
    SIMOX, an efficient etch-stop to fabricate silicon membranes with well defined thickness
    In: Extended abstracts: 181st Society Meeting / Meeting of the Electrochemical Society ; May 17 - 22, 1992, St. Louis, Mo., USA (1992) S. 321 - 322
  • Badenes, Goncal; Burbach, Gert; Gassel, Helmut; Vogt, Holger; Walter, Axel
    Minimum oxygen dose for reliable application of SIMOX
    In: International Conference on Advanced Materials (ICAM 91): Final book of abstracts (1991) S. D - IV2
  • Belz, Joachim; Burbach, Gert; Vogt, Holger; Pieczynski, Janusz
    Characterization of CMOS devices and circuits build on SIMOX substrates
    In: Extended abstracts: 177th Society Meeting ; Spring meeting ; Montreal, Quebec, Canada, 06.-11.05.1990 / Spring Meeting of the Electrochemical Society ; 06.-11.05.1990, Montreal, Quebec, Canada (1990) S. 504
  • Zimmer, Günter; Vogt, Holger; Belz, Joachim; Kaat, Erich H. te
    Buried silicon nitride formed by nitrogen implantation
    In: Extended Abstracts: 169th Society Meeting ; Vol. 1 / Meeting of the Electrochemical Society ; May 04 - 09, 1986, Boston, Mass., USA (1986) S. 110
  • Zimmer, Günter; Vogt, Holger; Gruber, Volker
    Optimization of contacts for CMOS
    In: ESSDERC '86, University of Cambridge, 8 - 11 September 1986: [16th European Solid State Device Research Conference] / European Solid State Device Research Conference (ESSDERC) ; 8 - 11 September 1986, Cambridge, UK / Moore, D. F. (Hrsg.) (1986) S. 170 - 171
  • Vogt, Holger; Zimmer, Günter
    Technology for VLSI devices on ion implanted buried silicon nitride
    In: SOI Technology and 3D integration: Extended Abstracts of the 2nd International Workshop on Future Electron Devices / International Workshop on Future Electron Devices ; FED SOI/3D Workshop ; March 19 - 21, 1985 Shuzenji, Japan (1985) S. 111 - 115
  • Zimmer, Günter; Fiedler, Horst-Lothar; Höfflinger, Bernd; Neubert, E.; Vogt, Holger
    A high-performance scaled Si gate CMOS technology
    In: 11th European Solid State Device Research Conference: ESSDERC 81 ; Toulouse, France, September 14th - 17th, 1981 ; Symposium on Solid State Device Technology, SSSDT 81 / European Solid State Device Research Conference (ESSDERC) ; Symposium on Solid State Device Technology (SSSDT) ; September 14th - 17th, 1981, Toulouse, France (1981) S. 87 - 88

    • Beiträge in Sammelwerken und Tagungsbänden

  • Münchenberger, Finja M.; Dreiner, Stefan; Kappert, Holger; Neubieser, Rahel-Manuela; Vogt, Holger
    Development of a 3D-integrated thermocatalytic sensor for combustible gas detection
    In: SMSI 2020: Sensor and Measurement Science International ; proceedings / Sensor and Measurement Science International (SMSI) ; 22.-25. Juni 2020, Nürnberg (abgesagt) 2020, S. 77 - 78
    Online Volltext: dx.doi.org/
  • Michel, Marvin D.; Weyers, Sascha; Weiler, Dirk; Geruschke, Thomas; Blaeser, Sebastian; Zakizade, Elahe; Hochschulz, Frank; Vogt, Holger
    Development of a scalable nanotube-microbolometer technology
    In: SMSI 2020: Sensor and Measurement Science International ; proceedings / Sensor and Measurement Science International (SMSI) ; 22.-25. Juni 2020, Nürnberg (abgesagt) 2020, S. 165 - 166
    Online Volltext: dx.doi.org/
  • Haase, Jan F.; Buchner, Andre; Grollius, Sara; Ruskowski, Jennifer; Vogt, Holger
    Measurement concept to reduce environmental impact in direct time-of-flight LiDAR sensors
    In: Proceedings of the Quantum Sensing and Nano Electronics and Photonics XVII 2020 / Quantum Sensing and Nano Electronics and Photonics Conference ; 2 - 6 February 2020, San Francisco, Calif., USA 2020 1128809
    Online Volltext: dx.doi.org/
  • Michel, Marvin; Weyers, Sascha J.; Weiler, Dirk; Blaeser, Sebastian; Zakizade, E.; Hochschulz, Frank; Vogt, Holger
    Scalable nanotube-microbolometer technology with pixel pitches from 12 down to 6 µm
    In: Electro-Optical and Infrared Systems: Technology and Applications XVII : 21-25 September 2020, online only, United Kingdom / Electro-Optical and Infrared Systems: Technology and Applications, 21.-25.09.2020, online only, United Kingdom / Hickman, Duncan L.; Bürsing, Helge (Hrsg.) 2020 1153704
    Online Volltext: dx.doi.org/
  • Girgenrath, Lutz; Hofmann, Martin; Kühnhold, Ralf; Vogt, Holger
    Characterization of the Charge Transfer in an Enhanced Pinned Photodiode with a Collection Gate
    In: Optics, Photonics and Laser Technology 2017 / International Conference on Photonics, Optics and Laser Technology (PHOTOPTICS) ; 27 February to 1 March 2017, Porto, Portugal / Ribeiro, Paulo; Andrews, David L.; Raposo, Maria (Hrsg.) 2019, S. 193 - 212
    Online Volltext: dx.doi.org/
  • Allani, Sonja; Jupe, Andreas; Kappert, Holger; Vogt, Holger
    Fabrication of Partly Encapsulated Vertical Nanoelectrodes for an Intracellular Microelectrode Array
    In: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (Transducers & Eurosensors XXXIII) / International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) ; Eurosensors ; 23.-27.06.2019, Berlin, Germany 2019, S. 1619 - 1622
    Online Volltext: dx.doi.org/
  • Walk, Christian; Netaev, Alexander; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
    Hermetical sealing of pressure sensor diaphragms by CVD of Si1-XGeX with minimized cavity deposition
    In: Smartsystems integration: 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems ; Barcelona, Spain, 10 – 11 April 2019 / Smartsystems Integration (SSI) ; International Conference and Exhibition on Integration Issues of Miniaturized Systems ; 10 - 11 April 2019, Barcelona, Spain / Otto, Thomas (Hrsg.) 2019, S. 234 - 241
  • Walk, Christian; Netaev, Alexander; Wiemann, Matthias; Görtz, Michael; Vogt, Holger; Mokwa, Wilfried; Seidl, Karsten
    Hermeticity of SI₁₋XGEX Diaphragms for the Fabrication of a Capacitive Post-CMOS Pressure Sensor
    In: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (Transducers & Eurosensors XXXIII) / International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) ; Eurosensors ; 23.-27.06.2019, Berlin, Germany 2019, S. 1862 - 1865
    Online Volltext: dx.doi.org/
  • Haase, Jan; Beer, Maik; Schrey, Olaf; Ruskowski, Jennifer; Brockherde, Werner; Vogt, Holger
    Measurement concept for direct time-of-flight sensors at high ambient light
    In: Quantum Sensing and Nano Electronics and Photonics XVI / Quantum Sensing and Nano Electronics and Photonics Conference, 2.-7. February 2019, San Francisco, California, USA / Razeghi, Manijeh (Hrsg.) 2019 109260W
    Online Volltext: dx.doi.org/
  • Michel, Marvin; Vogt, Holger
    Mechanical Test Structures for the Determination of Normal Stress in Multilayer Freestanding MEMS-Membranes
    In: PRIME 19: 15th Conference on Ph.D Research in Microelectronics and Electronics (PRIME 2019) ; conference proceedings) / Conference on Ph.D Research in Microelectronics and Electronics (PRIME), 15-18 July 2019, Lausanne, Switzerland 2019, S. 301 - 304
    Online Volltext: dx.doi.org/
  • Münchenberger, Finja M.; Dreiner, Stefan; Kappert, Holger; Vogt, Holger
    Post-CMOS 3D-Integration of a Nanopellistor
    In: PRIME 19: 15th Conference on Ph.D Research in Microelectronics and Electronics (PRIME 2019) ; conference proceedings) / Conference on Ph.D Research in Microelectronics and Electronics (PRIME), 15-18 July 2019, Lausanne, Switzerland 2019, S. 109 - 112
    Online Volltext: dx.doi.org/
  • Kalwa, Lukas; Gläsener, Stefan; Ruskowski, Jennifer; Figge, Martin; Kappert, Holger; Vogt, Holger
    Wafer-Level-3D-Integrationsverfahren für hochsensitive optische Sensoren
    In: 20. GMA/ITG-Fachtagung Sensoren und Messsysteme 2019: NürnbergConvention Center, 25. und 26. Juni 2019 / GMA/ITG-Fachtagung Sensoren und Messsysteme, 25.-26.06.2019, Nürnberg 2019, S. 236 - 242
    Online Volltext: dx.doi.org/ (Open Access)
  • Türk, Semih; Jupe, Andreas; Viga, Reinhard; Vogt, Holger
    Analysis and simulation of super-hydrophobic layers for microfluidic applications
    In: Mikro-Nano-Integration: Beiträge des 7. GMM-Workshops / GMM-Workshop Mikro-Nano-Integration ; 22.-23. Oktober 2018, Dortmund, Germany / Hoffmann, Martin (Hrsg.) 2018, S. 33 - 37
  • Türk, Semih; Verheyen, Erik; Viga, Reinhard; Allani, Sonja; Jupe, Andreas; Vogt, Holger
    Decreasing the Actuation Voltage in Electrowetting on Dielectric with Thin and Micro-Structured Dielectric
    In: 2018 PRIME: 14th Conference on PhD Research in Microelectronics and Electronics ; July 2nd-July 5th, 2018, Prague, Czech Republic / Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) ; July 2nd-July 5th, 2018, Prague, Czech Republic / Gola, Alberto (Hrsg.) 2018, S. 205 - 208
    Online Volltext: dx.doi.org/
  • Jupe, Andreas; Livshits, Pavel; Kahnert, Stefan; Figge, Martin; Mross, Stefan; Görtz, Michael; Kappert, Holger; Vogt, Holger; Goehlich, Andreas
    Development of a Piezoelectric Flexural Plate-Wave (FPW) Biomems-Sensor for Rapid Point-of-Care Diagnostics
    In: Nanostructured Materials for the Detection of CBRN / NATO Advanced Research Workshop on Nanostructured Materials for the Detection of CBRN ; 14–17 August 2017, Kiev, Ukraine / Bonča, Janez; Kruchinin, Sergei (Hrsg.) 2018, S. 199 - 212
    Online Volltext: dx.doi.org/
  • Dogan, Özgü; Mokwa, Wilfried; Mai, Lukas; Devi, Anjana; Vogt, Holger
    Die-level patterning of parylene F by Laser-Ablation for further Processing with ALD functional layers
    In: Smart Systems Integration: International Conference and Exhibition on Integration Issues of Miniaturized Systems, Dresden, Germany 11-12 April 2018 / Smart Systems Integration ; 12th International Conference and Exhibition on Integration Issues of Miniaturized Systems ; 11 - 12 April 2018, Dresden, Germany / Otto, Thomas (Hrsg.) 2018, S. 392 - 395
  • Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Stein, Matthias; Michel, Marvin D.; Kuhl, Andreas; Lerch, Renee; Petermann, Martin; Geruschke, Thomas; Blaeser, Sebastian; Weyers, Sascha; Vogt, Holger
    Digital uncooled IRFPAs based on microbolometers with 17 μm and 12 μm pixel pitch
    In: Electro-Optical and Infrared Systems: Technology and Applications XV / Electro-Optical and Infrared Systems: Technology and Applications, 12-13 September 2018, Berlin, Germany / Huckridge, David; Bürsing, Helge; Hickman, Duncan L. (Hrsg.) 2018 1079504
    Online Volltext: dx.doi.org/
  • Willsch, Benjamin; Te Heesen, Marius; Hauser, Julia; Dreiner, Stefan; Kappert, Holger; Vogt, Holger
    Evaluation of a median threshold based EEPROM-PUF concept implemented in a high temperature SOI CMOS technology
    In: 2018 13th IEEE International Conference on Design & Technology of Integrated Systems in Nanoscale Era (DTIS): proceedings ; April 10th-12th, 2018, Taormina, Italy / IEEE International Conference on Design & Technology of Integrated Systems in Nanoscale Era (DTIS) ; April 10th-12th, 2018, Taormina, Italy 2018 8368576
    Online Volltext: dx.doi.org/
  • Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Stein, Matthias; Michel, Marvin D.; Würfel, Daniel; Lerch, Renee; Petermann, Martin; Geruschke, Thomas; Blaeser, Sebastian; Weyers, Sascha; Vogt, Holger
    High-performance uncooled digital 17 μm QVGA-IRFPA-using microbolometer based on amorphous silicon with massively parallel Sigma-Delta-ADC readout
    In: Infrared Technology and Applications XLIV 2018: 16-19 April 2018, Orlando, Florida, United States / Infrared Technology and Applications ; 16 - 19 April 2018, Orlando, Florida, USA / Andresen, Bjørn F.; Fulop, Gabor F.; Hanson, Charles M.; Miller, John Lester; Norton, Paul R. (Hrsg.) 2018 1062419
    Online Volltext: dx.doi.org/
  • Haase, Jan F.; Beer, Maik; Ruskowski, Jennifer; Vogt, Holger
    Multi object detection in direct Time-of-Flight measurements with SPADs
    In: 2018 PRIME: 14th Conference on PhD Research in Microelectronics and Electronics ; July 2nd-July 5th, 2018, Prague, Czech Republic / Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) ; July 2nd-July 5th, 2018, Prague, Czech Republic / Gola, Alberto (Hrsg.) 2018, S. 237 - 240
    Online Volltext: dx.doi.org/
  • Münchenberger, Finja M.; Dreiner, Stefan; Kappert, Holger; Vogt, Holger
    New concept for post-CMOS pellistor integration
    In: Mikro-Nano-Integration: Beiträge des 7. GMM-Workshops / GMM-Workshop Mikro-Nano-Integration, 22.-23. Oktober 2018, Dortmund, Germany / Hoffmann, Martin (Hrsg.) 2018, S. 28 - 32
  • Allani, Sonja; Jupe, Andreas; Utz, Alexander; Schaal, Christopher; Rustom, Amin; Kappert, Holger; Vogt, Holger
    Penetrating nanoelectrodes for an electrical cell interface on CMOS ASIC
    In: Mikro-Nano-Integration: Beiträge des 7. GMM-Workshops / GMM-Workshop Mikro-Nano-Integration, 22.-23. Oktober 2018, Dortmund, Germany / Hoffmann, Martin (Hrsg.) 2018, S. 7 - 12
  • Walk, Christian; Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
    Post-CMOS MEMS capacitive pressure sensor : Porous ALD membrane for sacrificial layer release and diaphragm sealing
    In: Smart Systems Integration: International Conference and Exhibition on Integration Issues of Miniaturized Systems, Dresden, Germany, 11-12 April 2018 / Smart Systems Integration ; 12th International Conference and Exhibition on Integration Issues of Miniaturized Systems ; 11 - 12 April 2018, Dresden, Germany / Otto, Thomas (Hrsg.) 2018, S. 86 - 93
  • Knauß, Anna M.; Münchenberger, Finja M.; Dietz, Dorothee; Jupe, Andreas; Kappert, Holger; Vogt, Holger
    Thin film ALD materials as functional layer for 3D-integrated metal oxide gas-sensors
    In: Mikro-Nano-Integration: Beiträge des 7. GMM-Workshops / GMM-Workshop Mikro-Nano-Integration, 22.-23. Oktober 2018, Dortmund, Germany / Hoffmann, Martin (Hrsg.) 2018, S. 68 - 73
  • Walk, Christian; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
    A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
    In: MEMS, Mikroelektronik, Systeme: MikroSystemTechnik 2017 ; congress ; 23.-25. Oct. 2017 / MikroSystemTechnik Kongress ; 23.-25. Oktober 2017, München / Kutter, Christoph (Hrsg.) 2017, S. 90 - 93
  • Willsch, Benjamin; Hauser, Julia; Dreiner, Stefan; Goehlich, Andreas; Kappert, Holger; Vogt, Holger
    Analysis of semiconductor process variations by means of hierarchical median polish
    In: 2017 25th Austrian Workshop on Microelectronics: Austrochip 2017 ; 12 October 2017, Linz, Austria ; proceedings / Austrian Workshop on Microelectronics ; Austrochip ; 12 October 2017, Linz; Austria 2017, S. 1 - 5
    Online Volltext: dx.doi.org/
  • Makhlouf, Mohamed; Goller, Diana; Gendrisch, Lutz; Kolnsberg, Stephan; Vogt, Franz; Utz, Alexander; Weiler, D.; Vogt, Holger
    Automating wafer-level test of uncooled infrared detectors using wafer-prober
    In: 2017 IEEE 23rd International Symposium on On-Line Testing and Robust System Design (IOLTS): 3-5 July 2017, Hotel Makedonia Palace, Thessaloniki, Greece / International Symposium on On-Line Testing and Robust System Design (IOLTS) ; 03. - 05.07.2017, Thessaloniki, Greece 2017, S. 13 - 16
    Online Volltext: dx.doi.org/
  • Schwinger, Alexander; Brockherde, Werner; Hosticka, Bedrich; Vogt, Holger
    CMOS SiPM with integrated amplifier
    In: Optical Components and Materials XIV / Optical Components and Materials ; 30 January - 1 February 2017, San Francisco, California, USA / Jiang, Shibin; Digonnet, Michel J. F. (Hrsg.) 2017 101001A
    Online Volltext: dx.doi.org/
  • Walk, Christian; Vidovic, Nino; Görtz, Michael; Vogt, Holger
    Development of a patterning process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
    In: Smartsystems Integration: International Conference and Exhibition on the integration of materials, devices and systems ; Cork, Ireland, 8-9 March 2017 / Smart Systems Integration ; International Conference and Exhibition on the integration of materials, devices and systems ; 08. - 09.03.2017, Cork, Ireland / Otto, Thomas (Hrsg.) 2017, S. 306 - 313
  • Goller, Diana; Makhlouf, Mohamed; Utz, Alexander; Gendrisch, Lutz; Kolnsberg, Stephan; Vogt, Franz P.; Weiler, Dirk; Vogt, Holger
    Elektro-optische Charakterisierung von Ferninfrarot-Bildaufnehmern mittels Bauelementetest in der Serienproduktion
    In: MEMS, Mikroelektronik, Systeme: MikroSystemTechnik 2017 ; congress ; 23.-25. Oct. 2017 / MikroSystemTechnik Kongress 2017 ; 23.-25. Oktober 2017; München / Kutter, Christoph (Hrsg.) 2017, S. 468 - 471
  • Willsch, Benjamin; Muller, Kai-Uwe; Zhang, Qi; Hauser, Julia; Dreiner, Stefan; Stanitzki, Alexander; Kappert, Holger; Kokozinski, Rainer; Vogt, Holger
    Implementation of an integrated differential readout circuit for transistor-based physically unclonable functions
    In: 2017 25th Austrian Workshop on Microelectronics: Austrochip 2017 ; 12 October 2017, Linz, Austria ; proceedings / 25th Austrian Workshop on Microelectronics ; Austrochip 2017 ; 12 October 2017, Linz, Austria 2017, S. 58 - 63
    Online Volltext: dx.doi.org/
  • Girgenrath, Lutz; Hofmann, Martin; Kühnhold, Ralf; Vogt, Holger
    Optimization of transfer times in pinned photodiodes
    In: PHOTOPTICS 2017: Proceedings of the 5th International Conference on Photonics, Optics and Laser Technology / International Conference on Photonics, Optics and Laser Technology ; PHOTOPTICS ; February 27-March 1, 2017, Porto, Portugal / Raposo, Maria; Andrews, David; Ribeiro, Paulo A. (Hrsg.) 2017, S. 312 - 316
    Online Volltext: dx.doi.org/
  • Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger
    Tapering of nanoelectrodes for an intracellular contact via a double hard mask technique
    In: PRIME 2017: 13th Conference on Ph.D. Research in Microelectronics and Electronics ; conference proceedings ; 12th-15th June 2017, Giardini Naxos, Taormina, Italy / Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) ; 12.-15.06.2017, Taormina, Italy / Pennisi, Salvatore (Hrsg.) 2017, S. 305 - 308
    Online Volltext: dx.doi.org/
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    Untersuchung von dreidimensionalen Nanoelektroden für die intrazelluläre Kontaktierung auf integrierten Schaltungen
    In: MEMS, Mikroelektronik, Systeme: MikroSystemTechnik 2017 ; congress ; 23.-25. Oct. 2017 / MikroSystemTechnik Kongress 2017 ; 23.-25. Oktober 2017; München / Kutter, Christoph (Hrsg.) 2017, S. 540 - 543
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    ALD-based 3D-capacitors for harsh environments
    In: 2016 12th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) / Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) ; 27-30 June 2016, Lisbon, Portugal 2016 7519480
    Online Volltext: dx.doi.org/
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    Digital microfluidics for microchip-based cell sorting
    In: Micro-Nano-Integration: 6. GMM-Workshop : 5-6 Oct. 2016 / GMM-Workshop Mikro-Nano-Integration ; 5. - 6. Oktober 2016, Duisburg 2016, S. 17 - 21
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    Entwicklung eines piezoresistiven Drucksensors für Hochtemperaturanwendungen auf Basis eines SOI-Substrats
    In: Sensoren und Messsysteme 2016: 18. GMA/ITG-Fachtagung, Nürnberg Convention Center, 10. und 11. Mai 2016 ; Tagungsband / GMA/ITG-Fachtagung Sensoren und Messsysteme ; 10. und 11. Mai 2016, Nürnberg 2016, S. 28 - 35
    Online Volltext: dx.doi.org/
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    Materials and technologies to enable high temperature stable MEMS and electronics for smart systems used in harsh environments
    In: China Semiconductor Technology International Conference 2016 (CSTIC 2016) / China Semiconductor Technology International Conference (CSTIC) ; 13-14 March 2016, Shanghai, China / Claeys, Cor; Wu, Hanming; Lin, Qinghuang (Hrsg.) 2016 7463912
    Online Volltext: dx.doi.org/
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    Measurement results of a 12 μm pixel size microbolometer array based on a novel thermally isolating structure using a 17 μm ROIC
    In: Infrared Technology and Applications XLII: 18-21 April 2016, Baltimore, Maryland, United States / Conference on Infrared Technology and Applications ; 18-21 April 2016, Baltimore, Maryland, USA / Andresen, Bjørn F.; Fulop, Gabor F.; Hanson, Charles M.; Norton, Paul R. (Hrsg.) 2016 98191N
    Online Volltext: dx.doi.org/
  • Goehlich, Andreas; Vogt, Holger
    Nanostructures on CMOS-intelligent sensors and actuators by post processing
    In: Micro-Nano-Integration: 6. GMM-Workshop ; 5-6 Oct. 2016 / GMM-Workshop Mikro-Nano-Integration ; 5. - 6. Oktober 2016, Duisburg 2016, S. 182 - 187
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    Post-CMOS integrated ALD 3D micro- and nanostructures and application for multi-electrode arrays
    In: Micro-Nano-Integration: 6. GMM-Workshop ; 5-6 Oct. 2016 / GMM-Workshop Mikro-Nano-Integration ; 5-6 Oct. 2016, Duisburg, Germany 2016, S. 115 - 118
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    Post-CMOS integration of miniaturized solar cells for energy harvesting of autonomous sensor nodes
    In: Micro-Nano-Integration: 6. GMM-Workshop ; 5-6 Oct. 2016 / GMM-Workshop Mikro-Nano-Integration ; 5. - 6. Oktober 2016, Duisburg 2016, S. 151 - 155
  • Willsch, Benjamin; Hauser, Julia; Dreiner, Stefan; Goehlich, Andreas; Vogt, Holger
    Statistical tests to determine spatial correlations in the response behavior of PUFs
    In: 2016 12th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) / Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) ; 27-30 June 2016, Lisbon, Portugal 2016 7519475
    Online Volltext: dx.doi.org/
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    Ungekühlte Mikrobolometer-Arrays basierend auf einer neuartigen thermisch isolierenden Struktur
    In: Sensoren und Messsysteme 2016: 18. GMA/ITG-Fachtagung, Nürnberg Convention Center, 10. und 11. Mai 2016 ; Tagungsband / GMA/ITG-Fachtagung Sensoren und Messsysteme ; 10. und 11. Mai 2016, Nürnberg 2016, S. 242 - 248
    Online Volltext: dx.doi.org/
  • Jupe, Andreas; Goehlich, Andreas; Feizi, Khadijeh; Vogt, Holger
    ALD-basierte, monolithisch integrierte 3D-Nanostrukturen
    In: MEMS, Mikroelemente, Systeme: MikroSystemTechnik Kongress 2015 ; 26. - 28. Oktober 2015 in Karlsruhe ; proceedings / MikroSystemTechnik Kongress ; 26. - 28. Oktober 2015, Karlsruhe / Saile, Volker (Hrsg.) 2015, S. 405 - 408
  • Schmidt, Andrei; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
    Beschleunigte Zuverlässigkeitsuntersuchung von Siliziumnitrid bei schmalbandiger UV-Bestrahlung
    In: MEMS, Mikroelemente, Systeme: MikroSystemTechnik Kongress 2015 ; 26. - 28. Oktober 2015 in Karlsruhe ; proceedings / MikroSystemTechnik Kongress ; 26. - 28. Oktober 2015, Karlsruhe / Saile, Volker (Hrsg.) 2015, S. 753 - 756
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    CMOS integrated miniaturized photovoltaic cells for autonomous sensor nodes: simulations and experimental results
    In: SENSOR 2015: 17th International Conference on Sensors and Measurement Technology ; IRS² 2015 ; 14th International Conference on Infrared Sensors & Systems ; AMA conferences 2015 / International Conference on Sensors and Measurement Technology (SENSOR) ; 19. - 21.5.2015, Nuremberg, Germany 2015, S. 635 - 640
    Online Volltext: dx.doi.org/
  • Goehlich, Andreas; Jupe, Andreas; Stühlmeyer, Martin; Celik, Yusuf; Schmidt, Alexander; Vogt, Holger
    Charakterisierung und Modellierung freistehender Silizium Membranen auf SOI-Basis für Drucksensor-Anwendungen
    In: MEMS, Mikroelemente, Systeme: MikroSystemTechnik Kongress 2015 ; 26. - 28. Oktober 2015 in Karlsruhe ; proceedings / MikroSystemTechnik Kongress ; 26. - 28. Oktober 2015, Karlsruhe / Saile, Volker (Hrsg.) 2015, S. 610 - 613
  • Kahnert, Stefan; Schreiber, Fedor; Erni, Daniel; Greifendorf, Dieter; Lennartz, Klaus; Kirstein, Uwe; Bartels, Frank; Janzyk, Udo; Rennings, Andreas; Küppers, Ralf; Vogt, Holger
    Entwicklung einer Mikrochip navigierten Zellsortieranlage
    In: MEMS, Mikroelemente, Systeme: MikroSystemTechnik Kongress 2015 ; 26. - 28. Oktober 2015 in Karlsruhe ; proceedings / MikroSystemTechnik Kongress ; 26. - 28. Oktober 2015, Karlsruhe / Saile, Volker (Hrsg.) 2015, S. 463 - 466
  • Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger; Kappert, Holger
    Entwicklung von Hochtemperatur Trench-Kondensatoren unter Verwendung von dünnen ALD-Dielektrika
    In: MEMS, Mikroelemente, Systeme: MikroSystemTechnik Kongress 2015 ; 26. - 28. Oktober 2015 in Karlsruhe ; proceedings / MikroSystemTechnik Kongress ; 26. - 28. Oktober 2015, Karlsruhe / Saile, Volker (Hrsg.) 2015, S. 425 - 428
  • Walk, Christian; Goehlich, Andreas; Giese, Andre; Görtz, Michael; Vogt, Holger; Kraft, Michael
    Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor
    In: Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems: Barcelona, Spain ; 4 - 6 May 2015, Barcelona, Spain ; [part of SPIE microtechnologies] / Conference on Smart Sensors, Actuators, and MEMS; and Cyber Physical Systems ; 4 - 6 May 2015, Barcelona, Spain / Sánchez-Rojas, José Luis; Brama, Riccardo (Hrsg.) 2015 95170T
    Online Volltext: dx.doi.org/
  • Driewer, Adrian; Hosticka, Bedrich; Spickermann, Andreas; Vogt, Holger
    Modeling of CMOS image sensors for time-of-flight applications
    In: Optical Sensors 2015: 13 - 16 April 2015, Prague, Czech Republic ; [part of SPIE optics + optoelectronics] / Optical Sensors ; 13-16 April 2015, Prague, Czech Republic / Baldini, Francesco; Homola, Jiri; Lieberman, Robert A. (Hrsg.) 2015 950603
    Online Volltext: dx.doi.org/
  • Schmidt, Andrei; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
    Thin-film SOI PIN-diode leakage current dependence on back-gate-potential and HCI traps
    In: ESSCIRC/ESSDERC 2015: proceedings of the 45th European Solid-State Device Research Conference ; Messe Congress, Graz, Austria, September 14-18, 2015 / European Solid-State Device Research Conference (ESSDERC) ; September 14-18, 2015, Graz, Austria / Pribyl, Wolfgang; Grasser, Tibor; Schrems, Martin (Hrsg.) 2015, S. 290 - 293
    Online Volltext: dx.doi.org/
  • Weiler, Dirk; Hochschulz, Frank; Würfel, Daniel; Lerch, Renee G.; Geruschke, Thomas; Wall, Simone; Heß, Jennifer; Wang, Qiang; Vogt, Holger
    Uncooled digital QVGA-IRFPA with 17 µm pixel-pitch based on amorphous silicon with massively Sigma-Delta-ADC readout
    In: 42th Freiburg Infrared Colloquium / Freiburg Infrared Colloquium ; 03. - 04.03.2015, Freiburg, Germany 2015, S. 39 - 40
  • Poklonskaya, Elena; Durini, Daniel; Jung, Melanie; Schrey, Olaf; Driewer, Adrian; Brockherde, Werner; Hosticka, Bedrich; Vogt, Holger
    Performance analysis of a large photoactive area CMOS line sensor for fast, time-resolved spectroscopy applications
    In: Optical sensing and detection III / Optical Sensing and Detection III ; 14-17 April 2014, Brussels / Berghmans, Francis (Hrsg.) 2014 914103
    Online Volltext: dx.doi.org/
  • Weiler, Dirk; Hochschulz, Frank; Würfel, Daniel; Lerch, Renee; Geruschke, Thomas; Wall, Simone; Heß, Jennifer; Wang, Qiang; Vogt, Holger
    Uncooled digital IRFPA-family with 17µm pixel-pitch based on amorphous silicon with massively parallel Sigma-Delta-ADC readout
    In: Infrared technology and applications XL / Conference on Infrared Technology and Applications ; 5 - 8 May 2014, Baltimore, Maryland, USA / Andresen, Bjørn F. (Hrsg.) 2014 90701M
    Online Volltext: dx.doi.org/
  • Burmester, Kim; Goehlich, Andreas; Celik, Yusuf; Schmidt, Alexander; Klieber, Robert; Haas, Norbert; Greifendorf, Dieter; Vogt, Holger
    CMOS integrated free standing circular membrane for the detection of allergens and biomarkers
    In: Von Bauelementen zu Systemen: Proceedings / Mikrosystemtechnik Kongress 2013, 14. - 16. Oktober 2013 in Aachen 2013, S. 822 - 825
  • Jupe, Andreas; Goehlich, Andreas; Meißner, Frank; Endler, Ingolf; Vogt, Holger
    CMOS kompatible, nanomodifizierte Multi-Elektroden-Arrays
    In: Von Bauelementen zu Systemen: Proceedings / Mikrosystemtechnik Kongress 2013, 14. - 16. Oktober 2013, Aachen / Mokwa, Wilfried (Hrsg.) 2013, S. 592 - 595
  • Goehlich, Andreas; Burmester, Kim; Celik, Yusuf; Klieber, Robert; Greifendorf, Dieter; Haas, Norbert; Vogt, Holger
    Development of an universial allergen sensor system
    In: AMA conferences 2013 proceedings: Nürnberg Exhibition Centre, Germany, 14. - 16.5.2013 ; with SENSOR, OPTO, IRS 2 / Sensor 2013 ; 14. - 16.05.2013, Nürnberg, Germany 2013, S. 540 - 545
    Online Volltext: dx.doi.org/
  • Celik, Yusuf; Goehlich, Andreas; Jupe, Andreas; Vogt, Holger
    Entwicklung eines hochtemperaturfesten Kondensators für die Mikrosystemtechnik
    In: Von Bauelementen zu Systemen: Proceedings / Mikrosystemtechnik Kongress 2013, 14. - 16. Oktober 2013 in Aachen 2013, S. 834 - 836
  • Weiler, Dirk; Ruß, Marco; Würfel, Daniel; Lerch, Renee G.; Hochschulz, Frank; Wang, Qiang; Geruschke, Thomas; Heß, Jennifer; Vogt, Holger
    Far infrared digital IRFPA based on uncooled microbolometer for automotive and military applications
    In: 41th Freiburg Infrared Colloquium / Freiburg Infrared Colloquium ; 26. - 27.02.2013, Freiburg, Germany 2013, S. 51 - 52
  • Heiermann, Wolfgang; Geruschke, Thomas; Ruß, Marco; Vogt, Holger
    Flip-Chip Technologie für Anwendungstemperaturen > 250 °C
    In: Von Bauelementen zu Systemen: Proceedings / Mikrosystemtechnik Kongress 2013, 14. - 16. Oktober 2013, Aachen / Mokwa, Wilfried (Hrsg.) 2013, S. 709 - 712
  • Süss, Andreas; Nitta, Christian; Spickermann, Andreas; Durini, Daniel; Varga, Gabor; Jung, Melanie; Brockherde, Werner; Hosticka, Bedrich; Vogt, Holger; Schwope, Stefan
    Speed considerations for LDPD based time-of-flight CMOS 3D image sensors
    In: ESSCIRC 2013: Proceedings of the 39th European Solid‐State Circuits Conference / European Solid‐State Circuits Conference (ESSCIRC) ; 16 - 20 September 2013, Bucharest, Romania / Rusu, Ştefan (Hrsg.) 2013, S. 299 - 302
    Online Volltext: dx.doi.org/
  • Görtz, Michael; Betz, W.; Mokwa, Wilfried; Vogt, Holger; Kraft, Michael
    Verkapselungstechniken für implantierbare integrierte MEMS Drucksensoren
    In: Von Bauelementen zu Systemen: Proceedings / Mikrosystemtechnik Kongress 2013, 14. - 16. Oktober 2013, Aachen / Mokwa, Wilfried (Hrsg.) 2013, S. 586 - 587
  • Süss, Andreas; Hosticka, Bedrich; Vogt, Holger
    Adaptive readout circuit for pinned and lateral drift-field photo diodes
    In: PRIME 2012 / 8th Conference on Ph.D. Research in Microelectronics & Electronics, 12 - 15 Juni 2012, Aachen, Germany / Heinen, Stefan (Hrsg.) 2012, S. 333 - 336
  • Jupe, Andreas; Hoeren, André; Goehlich, Andreas; Meißner, Frank; Endler, Ingolf; Vogt, Holger
    Direct integration of carbon nanotubes on CMOS with high-temperature tungsten metallization
    In: Mikro-Nano-Integration: Beiträge des 4. GMM-Workshops, 12. - 13. November 2012 in Berlin / GMM-Workshop ; 12. - 13. November 2012, Berlin / Hoffmann, Martin (Hrsg.) 2012
  • Förster, Jan; Schüttler, Dennis; Vogt, Holger
    Excimer laser annealing of amorphous silicon-germanium layers for above IC processing
    In: PRIME 2012 / 8th Conference on Ph.D. Research in Microelectronics & Electronics (PRIME), 12 - 15 Juni 2012, Aachen, Germany / Heinen, Stefan (Hrsg.) 2012, S. 267 - 270
  • Heiermann, Wolfgang; Heß, Jennifer; Geruschke, Thomas; Bauer, Jochen; Ruß, Marco; Kappert, Holger; Vogt, Holger
    Process window of thermosonic palladium wire bonding on electroplated gold layers for high temperature applications
    In: MiNaPAD Forum 2012: Proceedings / 2nd Micro/Nano-Electronics Packaging & Assembly, Design and Manufacturing (MiNaPAD) Forum ; 25.-26.04.2012, Grenoble, France 2012
  • Heiermann, Wolfgang; Geruschke, Thomas; Grella, Katharina; Bartsch, M.; Borrmann, Thomas; Ruß, Marco; Vogt, Holger
    Reliability of thermosonic bonded palladium wires in high temperature environments up to 350 °C
    In: 23rd Micromechanics and Microsystems Europe Workshop: Proceedings / Micromechanics and Microsystems Europe (MME) Workshop ; September 9 - 12, 2012, Ilmenau, Germany / Scharff, Peter; Schneider, Andrea (Hrsg.) 2012 C 01
  • Heß, Jennifer; Vogt, Holger
    Sacrificial ion beam etching process for seed layer removal of 6 µm pitch CuSn micro bumps
    In: E-MRS spring meeting 2012, Symposium M: More than Moore ; Novel Materials Approaches for Functionalized Silicon Based Microelectronics ; Strasbourg, France, 14 - 18 May 2012 / E-MRS 2012 Spring Meeting, Symposium M ; 14.-18.05.2012, Strasbourg, France 2012 012005
    Online Volltext: dx.doi.org/ (Open Access)
  • Vogt, Holger; Weiler, Dirk
    Thermal Imagers based on uncooled microbolometers
    In: CMOS Imaging: Extending the dimensions / 6th Fraunhofer IMS Workshop ; 12.-13.06.2011, Duisburg, Germany 2012 [34 Bl.]
  • Weiler, Dirk; Ruß, Marco; Würfel, Daniel; Lerch, Renee; Yang, Pin; Bauer, Jochen; Kropelnicki, Piotr; Heß, Jennifer; Vogt, Holger
    A far infrared VGA detector based on uncooled microbolometers for automotive applications
    In: Advanced Microsystems for Automotive Applications 2011: Smart Systems for Electric, Safe and Networked Mobility / 15th International Forum on Advanced Microsystems for Automotive Applications (AMAA) ; 29 - 30 June 2011, Berlin, Germany / Meyer, Gereon; Valldorf, Jürgen (Hrsg.) 2011, S. 327 - 334
    Online Volltext: dx.doi.org/
  • Goehlich, Andreas; Jonville, Carole; Klieber, Robert; Mao, Xing; Martens, Kim; Jansen, Timo; Trieu, Hoc-Khiem; Vogt, Holger
    A novel mass sensitive sensor
    In: Mikrosystemtechnik Kongress 2011: Proceedings / Mikrosystemtechnik Kongress ; 10. - 12. Oktober 2011, Darmstadt / Schlaak, Helmut F. (Hrsg.) 2011, S. 54 - 57
  • Utz, Alexander; Gendrisch, Lutz; Brögger, Dirk; Weiler, Dirk; Vogt, Holger
    Bestimmung der NETD von Fern-Infrarot Imagern auf Wafer-Level unter Umgebungsdruck in der Serienproduktion
    In: Mikrosystemtechnik Kongress 2011: Proceedings / Mikrosystemtechnik Kongress ; 10. - 12. Oktober 2011, Darmstadt / Schlaak, Helmut F. (Hrsg.) 2011, S. 165 - 168
  • Hochschulz, Frank; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
    CMOS photodiodes for narrow linewidth applications
    In: IEEE Sensors, 2011: 28 - 31 Oct. 2011, Limerick, Ireland ; proceedings ; the Tenth IEEE Sensors Conference 2011 ; Vol. 3 / IEEE SENSORS ; 28 - 31 October 2011, Limerick, Ireland 2011, S. 1600 - 1603
    Online Volltext: dx.doi.org/
  • Weiler, Dirk; Ruß, Marco; Würfel, Daniel; Lerch, Renee G.; Yang, Pin; Bauer, Jochen; Heß, Jennifer; Kropelnicki, Piotr; Vogt, Holger
    Development of an uncooled 25µm pixel-pitch VGA-IRFPA
    In: 40th Freiburg Infrared Colloquium / Freiburg Infrared Colloquium ; 16.-17.02.2011, Freiburg, Germany 2011 Paper 5.2
  • Förster, Jan; Vogt, Holger
    Excimer laser-annealing of amorphous silicon layers
    In: COMSOL Conference, Stuttgart 2011: proceedings / COMSOL Conference, Stuttgart, 26.-28.10.2011 2011
    Online Volltext
  • Weiler, Dirk; Ruß, Marco; Würfel, Daniel; Lerch, Renee; Yang, Pin; Bauer, Jochen; Heß, Jennifer; Kropelnicki, Piotr; Vogt, Holger
    Improvements of a digital 25µm pixel-pitch uncooled amorphous silicon TEC-less VGA IRFPA with massively parallel Sigma-Delta-ADC readout
    In: Infrared technology and applications XXXVII: 25 - 29 April 2011, Orlando, Florida, United States ; Pt. 1 / 37th Conference on Infrared Technology and Applications ; 25 - 29 April 2011, Orlando, Florida, USA / Andresen, Bjørn F.; Fulop, Gabor F.; Norton, Paul R. (Hrsg.) 2011 80121F
    Online Volltext: dx.doi.org/
  • Hochschulz, Frank; Paschen, Uwe; Vogt, Holger
    Multiphysics simulations for the optimisation of CMOS processes for high precision optical measurement applications
    In: Multiphysics simulations - advanced methods for industrial engineering: Selected contributions from 1st Fraunhofer Multiphysics Conference / Fraunhofer Multiphysics Conference, 22.-23.06.2010, Bonn, Germany 2011, S. 239 - 249
  • Utz, Alexander; Gendrisch, Lutz; Weiler, Dirk; Kolnsberg, Stephan; Vogt, Holger
    Simulation method for LWIR radiation distribution using a visual ray-tracer
    In: Proceedings of the International Conference on Numerical Simulation of Optoelectronic Devices: NUSOD 2011; 5 - 8 Sept. 2011, Rome, Italy / International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) ; 5 - 8 Sept. 2011, Rome, Italy / Piprek, Joachim (Hrsg.) 2011, S. 57 - 58
    Online Volltext: dx.doi.org/
  • Hennig, Andreas; Vom Bögel, Gerd; Grabmaier, Anton; Vogt, Holger
    Telemetrisches Drucksensorsystem zur kontinuierlichen Blutdruckmessung im Herzen
    In: Tagungsband: Kongress für Technologien in der Medizin und Energieeffizienz in Kliniken, Wümek ; Würzburg, 23. - 25. Mai 2011 / Kongress für Technologien in der Medizin und Energieeffizienz in Kliniken (Wümek) ; 23. - 25. Mai 2011, Würzburg / Nippa, Jürgen (Hrsg.) 2011, S. 53 - 60
  • Weiler, Dirk; Ruß, Marco; Würfel, Daniel; Lerch, Renee; Yang, Pin; Bauer, Jochen; Vogt, Holger
    A digital 25 µm pixel-pitch uncooled amorphous silicon TEC-less VGA IRFPA with massive parallel Sigma-Delta-ADC readout
    In: Infrared technology and applications XXXVI: 5 - 9 April 2010, Orlando, Florida, United States / 36th Conference on Infrared Technology and Applications ; 5 - 9 April 2010, Orlando, Florida, USA / Andresen, Bjørn F.; Fulop, Gabor F.; Norton, Paul R. (Hrsg.) 2010 76600S
    Online Volltext: dx.doi.org/
  • Kropelnicki, Piotr; Vogt, Holger
    A new DC-temperature model for a diode bolometer based on SOI-pin-diode test structures
    In: XIth International Workshop on Symbolic and Numerical Methods, Modeling and Applications to Circuit Design (SM2ACD) / International Workshop on Symbolic and Numerical Methods, Modeling and Applications to Circuit Design (SM2ACD) ; 4-6 Oct. 2010, Gammarth, Tunisia 2010 5672328
    Online Volltext: dx.doi.org/
  • Hochschulz, Frank; Paschen, Uwe; Vogt, Holger
    CMOS process enhancement for high precision narrow linewidth applications
    In: Proceedings of the European Solid-State Device Research Conference (ESSDERC), 2010 / 40th European Solid-State Device Research Conference (ESSDERC) ; 14 - 16 September 2010, Sevilla, Spain 2010, S. 254 - 256
    Online Volltext: dx.doi.org/
  • Vogt, Holger; Durini, Daniel
    Devices and technologies for CMOS imaging
    In: 5th Fraunhofer IMS Workshop CMOS Imaging / Fraunhofer IMS Workshop CMOS Imaging ; 12.-13.06.2011, Duisburg, Germany 2010 [32 Bl.]
  • Bauer, Jochen; Weiler, Dirk; Ruß, Marco; Heß, Jennifer; Yang, Pin; Voß, Jürgen; Arnold, Norbert; Vogt, Holger
    Fabrication method for chip-scale-vacuum-packages based on a chip-to-wafer-process
    In: Electro-optical and infrared systems: technology and applications VII: 21 - 23 September 2010, Toulouse, France / Electro-Optical and Infrared Systems: Technology and Applications Conference ; 21 - 23 September 2010, Toulouse, France / Huckridge, David A.; Ebert, Reinhard R. (Hrsg.) 2010 78340S
    Online Volltext: dx.doi.org/
  • Förster, Jan; Vogt, Holger; Grabmaier, Anton
    Investigation of the temperature coefficient of electrical resistance and 1/f noise of laser-annealed amorphous silicon layers
    In: 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) 2010 / International Conference on Advanced Thermal Processing of Semiconductors (RTP) ; September 18, 2010 - October 1, 2010, Gainesville, Florida, USA / Lojek, Bo (Hrsg.) 2010, S. 104 - 109
    Online Volltext: dx.doi.org/
  • Uhlemann, A.; Aal, Andreas; Vogt, Holger
    A fast WLR test for the evaluation of EEPROM endurance
    In: IEEE International Integrated Reliability Workshop final report, 2009: Stanford Sierra Conference Center, S. Lake Tahoe, California, October 18-22, 2009 / IEEE International Integrated Reliability Workshop (IRW) ; October 18-22, 2009, S. Lake Tahoe, California, USA 2009, S. 20 - 24
    Online Volltext: dx.doi.org/
  • Vogt, Holger
    CMOS Post-Processing für kompakte, intelligente Mikrosysteme
    In: MikroSystemTechnik-Kongress 2009: 12. - 14. Oktober 2009, Berlin ; Proceedings / MikroSystemTechnik-Kongress ; 12. - 14. Oktober 2009, Berlin 2009 Paper 19
  • Betz, Wolfgang; Trieu, Hoc-Khiem; Vogt, Holger
    In-vitro tests for biostability of materials for micro implants
    In: MME 2009: 20th Micromechanics Europe Workshop : 20 - 22 September 2009, Toulouse, France / Micromechanics Europe Workshop (MME) ; 20 - 22 September 2009, Toulouse, France 2009 D 27.1-3
  • Sommer, Sebastian P.; Paschen, Uwe; Figge, Martin; Vogt, Holger
    Light switched plasma charging damage protection device allowing high field characterization
    In: ESSDERC 2009: Proceedings of the 39th European Solid-State Device Research Conference ; [Co-located with the 35th European Solid-State Circuits Conference (ESSCIRC 2009)] / European Solid-State Device Research Conference (ESSDERC) ; 14-18 September 2009, Athens, Greece / Tsoukalas, Dimitris; Dimoulas, Athanasios (Hrsg.) 2009, S. 181 - 184
    Online Volltext: dx.doi.org/
  • Vogt, Holger
    Films - ein Programm zur Simulation von AR-Schichten
    In: Oberflächentechnik für die Praxis: Plenarvorträge, Kurzvorträge, Posterzusammenfassungen / 4. Thüringer Grenz- und Oberflächentage ; 1. Thüringer Kolloquium "Dünne Schichten in der Optik" ; 16. - 18. September 2008, Jena / Tiller, Hans-Jürgen (Hrsg.) 2008, S. 282 - 283
  • Ruß, Marco; Bauer, Jochen; Vogt, Holger
    The geometric design of microbolometer elements for uncooled focal plane arrays
    In: Infrared Technology and Applications XXXIII: 9 - 13 April 2007, Orlando, Florida, USA / Conference on Infrared Technology and Applications ; 9 - 13 April 2007, Orlando, Florida, USA 2007 654223
    Online Volltext: dx.doi.org/
  • Vogt, Holger
    SPICE modeling of resistive, diode, and pyroelectric bolometer cells
    In: Infrared Technology and Applications XXXII: 17 - 21 April 2006, Kissimmee, Florida, USA / Conference on Infrared Technology and Applications ; 17 - 21 April 2006, Kissimmee, Florida, USA / Andresen, Bjørn F. (Hrsg.) 2006 62061S
    Online Volltext: dx.doi.org/
  • Vogt, Holger
    A new method to determine the tool count of a semiconductor factory using FabSim
    In: Proceedings of the 2004 Winter Simulation Conference: vol. 2 / Winter Simulation Conference (WSC) ; December 5 - 8, 2004, Washington, D.C., USA / Ingalls, Ricki G.; Rossetti, Manuel D.; Smith, Jeffrey S.; Peters, Brett A. (Hrsg.) 2004, S. 1925 - 1929
    Online Volltext: dx.doi.org/
  • Trieu, Hoc-Khiem; Köster, Oliver; Vogt, Holger
    Cost-effective test, calibration and assembly infrastructure for turnkey integrated pressure sensors
    In: COMS 2004: the 9th International Conference on the Commercialization of Micro and Nano Systems ; Edmonton, Canada, 29.08.-02.09.2004 / International Conference on the Commercialization of Micro and Nano Systems (COMS) ; 29.08.-02.09.2004, Edmonton, Canada 2004, S. 340 - 346
  • Vogt, Holger
    Medizinelektronik: Fraunhofer-Institut Mikroelektronische Schaltungen und Systeme
    In: Workshop Medizintechnik in der Fraunhofer-Gesellschaft: Tagungsband / Medizintechnik in der Fraunhofer-Gesellschaft ; 12.11.2004, Berlin, Germany 2004, S. 223 - 232
  • Vogt, Holger
    Discrete-event simulation using SystemC : interactive semiconductor factory modeling with FabSim
    In: Proceedings of the 2003 Winter Simulation Conference: Fairmont Hotel, New Orleans, LA, U.S.A., December 7 - 10, 2003 ; vol. 2 / Winter Simulation Conference (WSC) ; December 7 - 10, 2003, New Orleans, LA, USA / Chick, Stephen E.; Sanchez, Paul J.; Ferrin, David; Morrice, Douglas J. (Hrsg.) 2003, S. 1383 - 1387
    Online Volltext: dx.doi.org/
  • Vogt, Holger
    Synchronous discrete event simulation for fast and efficient simulation of a complete semiconductor factory
    In: Advancing the science of semiconductor manufacturing excellence: ASMC 2003 Proceedings ; 2003 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; 31 March - 1 April 2003, Munich, Germany / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) ; 31 March - 1 April 2003, Munich, Germany 2003, S. 89 - 95
    Online Volltext: dx.doi.org/
  • Sauerland, Frank; Paschen, Uwe; Vogt, Holger
    Investigation of the spatial distribution of current density and heat dissipation in high-power-semiconductor devices
    In: Area array packaging technologies: Fourth International Workshop on Area Array Packaging Technologies, April, 22-23, 2002, Berlin, Germany / International Workshop on Area Array Packaging Technologies ; April, 22-23, 2002, Berlin, Germany 2002 [10 Bl.]
  • Hariadi, Ihsan; Trieu, Hoc-Khiem; Vogt, Holger
    Modelling of microsystem flow sensor based on thermal time-of-flight mode
    In: Design, Test, Integration, and Packaging of MEMS/MOEMS 2002: 6 - 8 May 2002, Cannes, France / Conference on Design, Test, Integration and Packaging of MEMS/MOEMS ; 6 - 8 May 2002, Cannes, France / Courtois, Bernard; Karam, Jean Michel; Markus, Karen W.; Michel, Bernd; Mukherjee, Tamal; Walker, James A. (Hrsg.) 2002, S. 83 - 96
    Online Volltext: dx.doi.org/
  • Paschen, Uwe; Weyers, J.; van Bentum, Ralf; Steck, Beate; Vogt, Franz P.; Vogt, Holger
    Smart power integration on SOI : thin and thick film (local) SOI processes and devices
    In: CIPS 2000: International Conference on Integrated Power Systems, June 20 - 21, 2000, Bremen, Germany / International Conference on Integrated Power Systems (CIPS) ; June 20 - 21, 2000, Bremen, Germany 2000, S. 20 - 29
  • van Bentum, Ralf; Vogt, Holger
    Structural characterization of local SIMOX-substrates
    In: 1998 IEEE International SOI Conference proceedings / IEEE International SOI Conference ; October 5 - 8, 1998, Stuart, Florida, USA 1998, S. 49 - 50
    Online Volltext: dx.doi.org/
  • Radecker, Matthias; Fiedler, Horst-Lothar; Vogt, Franz P.; Vogt, Holger
    Single-chip class-E converter for compact fluorescent lamp ballast
    In: 1997 IEEE International Solid-state Circuits Conference: Digest of technical papers / IEEE International Solid-state Circuits Conference (ISSCC) ; February 6 - 8, 1997, San Francisco, Calif., USA / Wuorinen, John H. (Hrsg.) 1997, S. 378 - 379
    Online Volltext: dx.doi.org/
  • Vogt, Franz P.; Vogt, Holger; Radecker, Matthias; Fiedler, Horst-Lothar
    Smart power with 1200V DMOS
    In: ISPSD '97: 1997 IEEE International Symposium on Power Semiconductor Devices and ICs ; lectures held at the ETG-Conference ; May 26 - 29,1997 in Weimar, Germany / IEEE International Symposium on Power Semiconductor Devices and ICs (ISPSD) ; May 26 - 29,1997, Weimar, Germany 1997, S. 317 - 320
    Online Volltext: dx.doi.org/
  • Aslam, Ashfaq; Brockherde, Werner; Hosticka, Bedrich; Vogt, Holger; Zimmer, Günter
    A CMOS image sensor with combined analog nonvolatile storage capability
    In: 1996 International Electron Devices Meeting: San Francisco, CA, December 8 - 11, 1996 / International Electron Devices Meeting (IEDM) ; December 8-11, 1996, San Francisco, Calif. 1996, S. 923 - 926
    Online Volltext: dx.doi.org/
  • Vogt, Franz P.; Vogt, Holger; Brücker, Johannes; Zimmermann, Christoph; Richter, Frank
    An intelligent vertical trench DMOS on SIMOX-substrate
    In: 8th International Symposium on Power Semiconductor Devices and ICs: ISPSD '96 ; Proceedings / International Symposium on Power Semiconductor Devices and ICs (ISPSD) ; May 20 - 22, 1996, Maui, Hawaii, USA / Salama, C. A. T.; Williams, R. K. (Hrsg.) 1996, S. 177 - 180
    Online Volltext: dx.doi.org/
  • Zimmermann, Christoph; Fiedler, Horst-Lothar; Vogt, Franz P.; Vogt, Holger; Müsch, E.
    Ein monolithischer PWM-Dimmer für Automobilanwendungen in SIMOX-Technologie
    In: Mikroelektronik: Vorträge der GME-Fachtagung vom 20. bis 22. März 1995 in Baden-Baden / GME-Fachtagung Mikroelektronik ; 20. bis 22. März 1995, Baden-Baden / Barke, Erich (Hrsg.) 1995, S. 393 - 398
  • Dura, Heinz-Georg; Mokwa, Wilfried; Vogt, Holger
    Qualitätssicherungsstrategie bei der Kleinserienfertigung von Wasserstoffsensoren auf der Basis von MOS-Bauelementen
    In: Tagungsband zur Forschungstagung Qualität '95 / Forschungstagung Qualität ; 12. Oktober 1995, Frankfurt, Main 1995, S. 159 - 166
  • Vogt, Holger
    Advantages and potential of SOI structures for smart sensors
    In: Proceedings of the Sixth International Symposium on Silicon-On-Insulator Technology and Devices / International Symposium on Silicon-on-Insulator Technology and Devices ; 22 - 27 May 1994, San Francisco, Calif., USA / Cristoloveanu, Sorin (Hrsg.) 1994, S. 430 - 440
  • Gassel, Helmut; Vogt, Holger
    Improvement of SIMOX buried oxide breakdown voltage by multiple step and multiple energy implantation
    In: Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices / International Symposium on Silicon-on-Insulator Technology and Devices ; 22 - 27 May 1994, San Francisco, Calif., USA / Cristoloveanu, Sorin (Hrsg.) 1994, S. 357 - 366
  • Buttler, Werner; Cesura, Giovanni; Manfredi, Pier Francesco; Re, Valerio; Speziali, Valeria; Burbach, Gert; Vogt, Holger
    A bulk-JFET and CMOS/SIMOX technology for low noise, high speed charge-sensitive amplifier
    In: 1993 IEEE International SOI Conference: Proceedings ; October 5-7, 1993, the Autry Resort, Palm Springs, California / IEEE International SOI Conference ; October 5-7, 1993, Palm Springs, California, USA / Scott, John (Hrsg.) 1993, S. 186 - 187
    Online Volltext: dx.doi.org/
  • Mütterlein, Bernward; Vogt, Franz P.; Weyers, J.; Vogt, Holger
    An intelligent 600 V vertical IGBT on SIMOX substrate
    In: ESSDERC '93: proceedings of the 23rd European Solid State Device Research Conference, Grenoble, France, 13-16 September 1993 / European Solid State Device Research Conference (ESSDERC) ; 13-16 September 1993, Grenoble, France / Borel, Joseph (Hrsg.) 1993, S. 879 - 882
  • Hemming, Erwin; Fiedler, Horst-Lothar; Mütterlein, Bernward; Vogt, Franz P.; Vogt, Holger; Rosch, Rainer; Goldyn, Dirk; Zapp, Robert
    Monolithischer Phasenabschnitt-Dimmer in 500-V-SIMOX-Technologie
    In: Mikroelektronik: Vorträge der GME-Fachtagung vom 8. bis 10. März 1993 in Dresden / GME-Fachtagung Mikroelektonik ; 8. bis 10. März 1993, Dresden / Seitzer, Dieter (Hrsg.) 1993, S. 265 - 269
  • Vogt, Holger
    Smart power technology with dielectric insulation \textless1\textgreater : Processes and applications
    In: 3rd Mideuropean Symposium and Exhibition on Semiconductor Engineering and Technology SET '92: October 12 - 14, 1991 in Warsaw, Poland / Mideuropean Symposium and Exhibition on Semiconductor Engineering and Technology (SET) ; October 12 - 14, 1991, Warsaw, Poland / Jakubowski, A. (Hrsg.) 1993, S. 63 - 65
  • Weyers, J.; Vogt, Holger
    A 50 V smart power process with dielectric isolation by SIMOX
    In: International Electron Devices Meeting 1992: San Francisco, CA, December 13 - 16, 1992 ; Technical digest / International Electron Devices Meeting (IEDM) ; December 13 - 16, 1992, San Francisco, CA, USA 1992, S. 225 - 228
    Online Volltext: dx.doi.org/
  • Vogt, Franz P.; Mütterlein, Bernward; Vogt, Holger
    An intelligent 500 V power vertical DMOS on SIMOX substrate
    In: Proceedings of the Fifth International Symposium on Silicon-on-Insulator Technology and Devices / International Symposium on Silicon-on-Insulator Technology and Devices ; May 17 - 22, 1992, St. Louis, Missouri / Bailey, Wayne E. (Hrsg.) 1992, S. 77 - 88
  • Weyers, J.; Vogt, Holger; Berger, Michael; Mach, Wolfgang; Mütterlein, Bernward; Raab, Michael; Richter, Frank; Vogt, Franz P.
    Integration of vertical/quasivertical DMOS, CMOS and bipolar transistors in a 50V SIMOX process
    In: Solid state device research 92: proceedings of the 22nd European Solid State Device Research Conference, ESSDERC '92, 14 - 17 September 1992, Leuven, Belgium / European Solid State Device Research Conference (ESSDERC) ; 14 - 17 September 1992, Leuven, Belgium / Maes, Herman E.; Mertens, R. P.; van Overstraeten, R. J. (Hrsg.) 1992, S. 733 - 735
  • Gassel, Helmut; Peter-Weidemann, Jürgen; Vogt, Holger
    Novel approach to defect etching in thin film SOI
    In: Proceedings of the Fifth International Symposium on Silicon-on-Insulator Technology and Devices / International Symposium on Silicon-on-Insulator Technology and Devices ; May 17 - 22, 1992, St. Louis, Missouri / Bailey, Wayne E. (Hrsg.) 1992, S. 251 - 258
  • Dura, Heinz-Georg; Gassel, Helmut; Mokwa, Wilfried; Vogt, Holger
    SIMOX, an efficient etch-stop to fabricate silicon membranes with well defined thickness
    In: Proceedings of the Fifth International Symposium on Silicon-on-Insulator Technology and Devices / International Symposium on Silicon-on-Insulator Technology and Devices ; May 17 - 22, 1992, St. Louis, Missouri / Bailey, Wayne E. (Hrsg.) 1992, S. 403 - 408
  • Pieczynski, Janusz; Vogt, Holger
    Characterization of CMOS-process using test chips and automatic test system
    In: SEMICON/Europa 91, March 5 - 6, 1991, Zürich, Switzerland: defect control and related yield management / Semiconductor Equipment and Materials International Conference (SEMICON) ; March 5 - 6, 1991, Zürich, Switzerland 1991, S. 160 - 168
  • Badenes, Goncal; Burbach, Gert; Gassel, Helmut; Vogt, Holger
    SIMOX-devices for analog circuits
    In: 1991 IEEE International SOI Conference Proceedings / IEEE International SOI Conference ; October 1 - 3, 1991, Vail Valley, Colorado, USA / Duffy, Michael T. (Hrsg.) 1991, S. 168 - 169
    Online Volltext: dx.doi.org/
  • Dura, Heinz-Georg; Belz, Joachim; Mokwa, Wilfried; Vogt, Holger; Zimmer, Günter
    Batch process for the production of single crystal silicon membranes by the use of SIMOX-wafers
    In: Technical digest / MME '90, Micromechanics Europe 1990: 2nd Workshop on Micromachining, Micromechanics and Microsystems, Berlin, Germany, 26 - 27 November 1990 / Workshop on Micromachining, Micromechanics and Microsystems (MME) ; 26 - 27 November 1990, Berlin, Germany 1990, S. 31 - 35
  • Belz, Joachim; Burbach, Gert; Vogt, Holger; Pieczynski, Janusz
    Characterization of CMOS-devices and circuits built on SIMOX substrates
    In: Proceedings of the Fourth International Symposium on Silicon-on-Insulator Technology and Devices: International Symposium on Silicon-on-Insulator Technology and Devices ; May 8 - 11, 1990, Montreal, Quebec, Canada / Schmidt, Dennis N. (Hrsg.) 1990, S. 518 - 523
  • Zimmer, Günter; Vogt, Holger
    Introduction to VLSI technology
    In: Proceedings of the First International Workshop on Digital Signal Processing Techniques Applied to Space Communications: 9-10 November 1988, ESTEC, Noordwijk, the Netherlands / International Workshop on Digital Signal Processing Techniques Applied to Space Communications ; 9-10 November 1988, Noordwijk, The Netherlands 1990, S. 155 - 161
  • Belz, Joachim; Boguszewicz, Remigiusz; Burbach, Gert; Fiedler, Horst-Lothar; Karl, Rainer; Mütterlein, Bernward; Stein, Erhard; Vogt, Franz P.; Vogt, Holger
    Smart-Power-Schalter mit integrierter, dielektrisch isolierter CMOS-Ansteuerung
    In: BICMOS und Smart Power: Anwendungen, Stand, Perspektiven ; Vorträge der GME-Fachtagung 6. bis 7. Februar 1990 in Bad Nauheim / GME-Fachtagung BICMOS und Smart Power ; 6. bis 7. Februar 1990, Bad Nauheim / Zimmer, Günter (Hrsg.) 1990, S. 155 - 161
  • Belz, J.; Burbach, Gert; Vogt, Holger; Zimmermann, W.
    Temperature behaviour of CMOS devices built on SIMOX substrates
    In: ESSDERC 90: 20th European Solid State Device Research Conference, Nottingham, 10-13 September 1990 / European Solid State Device Research Conference (ESSDERC) ; 10-13 September 1990, Nottingham, UK / Eccleston, W.; Rosser, P. J. (Hrsg.) 1990, S. 449 - 452
  • Pieczynski, Janusz; Vogt, Holger
    Automatic parameter extraction system with process failure diagnosis for CMOS process
    In: ICMTS 1989: Proceedings of the 1989 International Conference on Microelectronic Test Structures ; Edinburgh, Scotland, 13 - 14th March 1989 / International Conference on Microelectronic Test Structures (ICMTS) ; 13 - 14 March 1989, Edinburgh, Scotland 1989, S. 205 - 210
    Online Volltext: dx.doi.org/
  • Belz, Joachim; Burbach, Gert; Vogt, Holger; Zimmer, Günter
    CMOS/SOI-Technologie auf implantiert vergrabenem Isolator
    In: Mikroelektronik: (bisher "Großintegration") ; Vorträge d. GME-Fachtagung vom 13. bis 15. März 1989 in Baden-Baden / GME-Fachtagung Mikroelektronik ; 13. bis 15. März 1989, Baden-Baden / Strack, Hans (Hrsg.) 1989, S. 103 - 107
  • Buttler, Werner; Hosticka, Bedrich; Lutz, Gerhard; Manfredi, Pier Francesco; Vogt, Holger
    Rauscharme und strahlungsfeste JFET - CMOS Auslese-Verstärker
    In: Mikroelektronik: (bisher "Großintegration") ; Vorträge der GME-Fachtagung vom 13. bis 15. März 1989 in Baden-Baden / GME-Fachtagung Mikroelektronik ; 13. bis 15. März 1989, Baden-Baden / Strack, Hans (Hrsg.) 1989, S. 133 - 138
  • Stuch, Detlef; Skapa, Helmut; Vogt, Holger; Zimmer, Günter
    Development of CMOS compatible p-channel junction-field-effect transistors for very low noise applications
    In: Solid state devices: proceedings of the 17. European Solid State Device Research Conference, ESSDERC '87, Bologna, Italy, 14 - 17 Sept. 1987 / European Solid State Device Research Conference (ESSDERC) ; 14 - 17 Sept. 1987, Bologna, Italy / Soncini, Giovanni; Calzolari, Pier Ugo (Hrsg.) 1988, S. 675 - 678
  • Zhang, Yinne; Dobos, Karoly; Mokwa, Wilfried; Xiao, Gang; Vogt, Holger; Zimmer, Günter
    MOSFET gas sensor with integrated temperature measurement and heating elements fabricated with standard CMOS technology
    In: Eurosensors II: 4th Symposium on Sensors and Actuators ; technical digest, final programme / Eurosensors ; Symposium on Sensors and Actuators ; November 02 - 04, 1988, Enschede, The Netherlands 1988, S. 55
  • Belz, Joachim; Kaat, Erich H. te; Zimmer, Günter; Vogt, Holger
    The growth of buried silicon nitride formed by nitrogen implantation
    In: Dielectric layers in semiconductors: novel technologies and devices / 12th Meeting of the European Materials Research Society ; June 17 - 20, 1986, Strasbourg, France / Bentini, G. B. (Hrsg.) 1986, S. 121 - 122
  • Stein, Erhard; Salten, E.; Vogt, Holger; Zimmer, Günter
    DODES, a program for modelling MOS and bipolar technologies
    In: U.S.-Federal Republic of Germany Joint Workshop on Fundamental problems in VLSI processing / Workshop on Fundamental problems in VLSI processing ; 07.-09.07.1982, Munich, Germany 1982, S. 111 - 113

    • Bücher/Sammelwerke/Tagungsbände

  • Vogt, Holger
    Mehrlagenmetallisierung für hochintegrierte mikroelektronische Schaltungen
    In: Fortschritt-Berichte VDI : Reihe 9 Düsseldorf Jg. 167 (1993) V, 155 S.

    • Dissertation

  • Vogt, Holger
    Hochdosisimplantation von Stickstoff in Silizium : eine Technik zur Erzeugung von dielektrisch isolierten CMOS-Bauelementen mit hoher Integrationsdichte
    In: Fortschrittberichte VDI : Reihe 9, Elektronik, Mikro- und Nanotechnik Düsseldorf Jg. 64 (1986) 152 Seiten