Molecular beam epitaxy (MBE), Conversion electron Mössbauerspectroscopy (CEMS) MBE/CEMS

You find this chamber in room MD 442. Samples are prepared by MBE and investigated in situ by CEMS, AES, LEED, and RHEED.

UHV system for preparation of samples by MBE and CEMS investigations equipped with:

• CEMS system with electromagnetic motor, Be window and channeltron
• Auger electron spectrometer (AES)
• RHEED optics with CCD camera to record the RHEED diffraction pattern on a fluorescence screen during evaporation
• LEED optics for surface characterization
• up to five Knudsen cells with Al₂O₃ crucibles
• electron beam evaporator
• atomic hydrogen source, used for in situ damage-free cleaning of residual oxygen prior to sample coating or analysis and for passivation of semiconductor surfaces by dangling bond saturation
• quadrupole mass spectrometer
• sputter gun for substrate cleaning
• manipulator for sample movement in three spacial directions and rotation about polar and azimuthal angles
• sample temperature 80 - 900 K