© ICAN 2020 | Figure 1

What can a Focused Ion Beam do?

Prof. Dr. Lorke's working group uses a FIB/SEM DualBeam™ microscope from FEI as a "nanoworkbench" for sample preparation on a nanometre scale. With this device, it is possible on the one hand - as with a classic scanning electron microscope (SEM) - to take images of samples with very high resolution and on the other hand to structure samples with the help of gallium ions. The abbreviation FIB stands for Focused Ion Beam. Both possibilities are combined here in one device.

Figure 1: Electron microscope image of a cross-section prepared with the ion beam through an electrode for a Li battery top view (left), view of the cross-section (right).

© ICAN 2020 | Figure 2

Figure 2: CENIDE lettering textured into a hair with the ion beam (subsequently coloured).

© ICAN 2020 | Figure 3

Figure 3: Hall measurement geometry structured with the ion beam from a nanoporous indium tin oxide film.

Further information

Focused Ion Beam in ICAN

© ICAN 2020

Mapping using SEM and FIB

Imaging of sample surfaces is possible with the electron beam as well as the ion beam up to a resolution of approx. 1 nm and 5 nm respectively.

© ICAN 2020

Cutting and structuring

With the help of the ion beam, it is possible to carry out lateral structuring of samples, but also to cut into the sample in order to examine cross-sections of the samples.

© ICAN 2020

Local material deposition

In addition, this device allows the deposition of platinum, as a conductive material, and silicon oxide, as an insulating material.

© ICAN 2020

Preparation of TEM lamella

For an examination by TEM, it is necessary to prepare a very thin lamella. This can be achieved in the conventional way by polishing.

© ICAN 2020

FEI Helios NanoLab™ 600

Device specifications

Your contact for the FIB:

ICAN - Interdisciplinary Center for Analytics on the Nanoscale

Address
NETZ | Raum U1.13 | Carl-Benz-Str. 199
47057 Duisburg
Room
LN U1.13

Functions

  • Technische/r Mitarbeiter/in, Center for Nanointegration Duisburg-Essen

Current lectures

No current lectures.

Past lectures (max. 10)

No past lectures.

The following publications are listed in the online university bibliography of the University of Duisburg-Essen. Further information may also be found on the person's personal web pages.

    Journal articles

  • Tigges, Sebastian; Wöhrl, Nicolas; Radev, Ivan; Hagemann, Ulrich; Heidelmann, Markus; Nguyen, Thai Binh; Gorelkov, Stanislav; Schulz, Stephan; Lorke, Axel
    One-step synthesis of carbon-supported electrocatalysts
    In: Beilstein Journal of Nanotechnology Vol. 11 (2020) pp. 1419 - 1431
  • Research report

  • Nguyen, Thai; Heidelmann, Markus
    The ultramicrotome as a tool for the preparation of ultra-thin samples for TEM investigations
    In: ICAN Notes Vol. 4 (2021)