Focused Ion Beam
What can a Focused Ion Beam do?
Prof. Dr. Lorke's working group uses a FIB/SEM DualBeam™ microscope from FEI as a "nanoworkbench" for sample preparation on a nanometre scale. With this device, it is possible on the one hand - as with a classic scanning electron microscope (SEM) - to take images of samples with very high resolution and on the other hand to structure samples with the help of gallium ions. The abbreviation FIB stands for Focused Ion Beam. Both possibilities are combined here in one device.
Figure 1: Electron microscope image of a cross-section prepared with the ion beam through an electrode for a Li battery top view (left), view of the cross-section (right).
Figure 2: CENIDE lettering textured into a hair with the ion beam (subsequently coloured).
Figure 3: Hall measurement geometry structured with the ion beam from a nanoporous indium tin oxide film.
Further information
Focused Ion Beam in ICAN
Mapping using SEM and FIB
Imaging of sample surfaces is possible with the electron beam as well as the ion beam up to a resolution of approx. 1 nm and 5 nm respectively.
Cutting and structuring
With the help of the ion beam, it is possible to carry out lateral structuring of samples, but also to cut into the sample in order to examine cross-sections of the samples.
Local material deposition
In addition, this device allows the deposition of platinum, as a conductive material, and silicon oxide, as an insulating material.
Preparation of TEM lamella
For an examination by TEM, it is necessary to prepare a very thin lamella. This can be achieved in the conventional way by polishing.
FEI Helios NanoLab™ 600
Device specifications
Your contact for the FIB:
ICAN - Interdisciplinary Center for Analytics on the Nanoscale
47057 Duisburg
Functions
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Technische/r Mitarbeiter/in, Center for Nanointegration Duisburg-Essen
Current lectures
No current lectures.
Past lectures (max. 10)
No past lectures.
The following publications are listed in the online university bibliography of the University of Duisburg-Essen. Further information may also be found on the person's personal web pages.
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One-step synthesis of carbon-supported electrocatalystsIn: Beilstein Journal of Nanotechnology Vol. 11 (2020) pp. 1419 - 1431Online Full Text: dx.doi.org/ (Open Access)
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The ultramicrotome as a tool for the preparation of ultra-thin samples for TEM investigationsIn: ICAN Notes Vol. 4 (2021)Online Full Text: dx.doi.org/ Online Full Text (Open Access)