MBE/CEMS chamber AG Wende
Molecular beam epitaxy (MBE), Conversion electron Mössbauerspectroscopy (CEMS) MBE/CEMS
You find this chamber in room MD 442. Samples are prepared by MBE and investigated in situ by CEMS, AES, LEED, and RHEED.
![](/imperia/md/images/agwende/mbecems.jpg)
UHV system for preparation of samples by MBE and CEMS investigations equipped with:
- CEMS system with electromagnetic motor, Be window and channeltron
- Auger electron spectrometer (AES)
- RHEED optics with CCD camera to record the RHEED diffraction pattern on a fluorescence screen during evaporation
- LEED optics for surface characterization
- up to five Knudsen cells with Al2O3 crucibles
- electron beam evaporator
- atomic hydrogen source, used for in situ damage-free cleaning of residual oxygen prior to sample coating or analysis and for passivation of semiconductor surfaces by dangling bond saturation
- quadrupole mass spectrometer
- sputter gun for substrate cleaning
- manipulator for sample movement in three spacial directions and rotation about polar and azimuthal angles
- sample temperature 80 - 900 K