Cleanroom
Sample preparation
![](/imperia/md/images/ag-farle/labore/fittosize__600_0_d5c89669f7d9c35bc92a43ade0c4da83_reinraum2.jpg)
Specifications
- Flowboxes with ISO 6 (ISO 14644)
- hot plate up to 250°C
- Spin Coater with up to 8000 rpm
- Ultrasonic bath
- Aceton and Isopropanol with cleanroom quality
- DI water
Electron beam lithography
![](/imperia/md/images/ag-farle/slides-1/fittosize__600_0_c0f652a76e3c14ac42f185b3ab19a961_interferenzlithography_006.jpg)
Specifications
- Spin coater with up to 8000 rpm
- Different positiv/negative resists
- Resist thickness up to 1000nm